About: EUV radiation from nitrogen capillary discharge

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In the last decade EUV sources attract interest from researchers over the world. One of the main motivations is EUV lithography, which could lead to further miniaturization in electronics. Nitrogen recombination laser at wavelength of 13.4 nm based on capillary discharge Z-pinch configuration could be used in experiments with testing of resolution of photoresist for EUV lithography (close to wavelength of 13.5 nm Si/Mo multilayer mirrors have a high reflectivity at normal incidence angles). In this work,pinching of nitrogen-filled capillary discharge is studied for the development of EUV laser,which is based on recombination pumping scheme.The goal of this study is achieving the required plasma conditions using a capillary discharge Z-pinch apparatus.In experiments with nitrogen,the capillary length was shortened from 232 mm to 90 mm and current quarter-period was changed from 60 ns to 50 ns in contrast with early experiments with Ne-like argon laser.EUV radiation from capillary In the last decade EUV sources attract interest from researchers over the world. One of the main motivations is EUV lithography, which could lead to further miniaturization in electronics. Nitrogen recombination laser at wavelength of 13.4 nm based on capillary discharge Z-pinch configuration could be used in experiments with testing of resolution of photoresist for EUV lithography (close to wavelength of 13.5 nm Si/Mo multilayer mirrors have a high reflectivity at normal incidence angles). In this work,pinching of nitrogen-filled capillary discharge is studied for the development of EUV laser,which is based on recombination pumping scheme.The goal of this study is achieving the required plasma conditions using a capillary discharge Z-pinch apparatus.In experiments with nitrogen,the capillary length was shortened from 232 mm to 90 mm and current quarter-period was changed from 60 ns to 50 ns in contrast with early experiments with Ne-like argon laser.EUV radiation from capillary (en)
Title	EUV radiation from nitrogen capillary discharge EUV radiation from nitrogen capillary discharge (en)
skos:prefLabel	EUV radiation from nitrogen capillary discharge EUV radiation from nitrogen capillary discharge (en)
skos:notation	RIV/61389021:_____/14:00431262!RIV15-AV0-61389021
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(LG13029)
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Štraus, Jaroslav Koláček, Karel Schmidt, Jiří Frolov, Oleksandr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav fyziky plazmatu AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	15260
http://linked.open...ai/riv/idVysledku	RIV/61389021:_____/14:00431262
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	EUV radiation; capillary discharge; EUV source; Z-pinch (en)
http://linked.open.../riv/klicoveSlovo	Z-pinch EUV radiation capillary discharge EUV source
http://linked.open...ontrolniKodProRIV	[BDBB01E6F295]
http://linked.open...v/mistoKonaniAkce	Singapore
http://linked.open...i/riv/mistoVydani	Singapore
http://linked.open...i/riv/nazevZdroje	International Journal of Modern Physics: Conference Series
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Research in the Frame of the Internatinal Center for Dense Magnetized Plasmas
http://linked.open...UplatneniVysledku	2014
http://linked.open...iv/tvurceVysledku	Frolov, Oleksandr Koláček, Karel Schmidt, Jiří Štraus, Jaroslav
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2013-12-04 (xsd:date)
issn	2010-1945
number of pages	7 (xsd:int)
http://bibframe.org/vocab/doi	10.1142/S2010194514603299
http://purl.org/ne...btex#hasPublisher	World Scientific Publishing Co

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