About: Photonometers for coating and sputtering machines     Goto   Sponge   NotDistinct   Permalink

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Description
  • The concept of photonometers (alternative name of optical monitor of a vacuum deposition process)for coating and sputtering machines is based on photonometers produced by companies like SATIS or HV Dresden. Photometers were developed in the TOPTEC centre and its predecessor VOD (Optical Development Workshop of Institut of Plasma Physics AS CR) for more than 10 years. The article describes current status of the technology and ideas which will be incorporated in next development steps. Hardware and software used on coating machines B63D, VNA600 and sputtering machine UPM810 is presented.
  • The concept of photonometers (alternative name of optical monitor of a vacuum deposition process)for coating and sputtering machines is based on photonometers produced by companies like SATIS or HV Dresden. Photometers were developed in the TOPTEC centre and its predecessor VOD (Optical Development Workshop of Institut of Plasma Physics AS CR) for more than 10 years. The article describes current status of the technology and ideas which will be incorporated in next development steps. Hardware and software used on coating machines B63D, VNA600 and sputtering machine UPM810 is presented. (en)
Title
  • Photonometers for coating and sputtering machines
  • Photonometers for coating and sputtering machines (en)
skos:prefLabel
  • Photonometers for coating and sputtering machines
  • Photonometers for coating and sputtering machines (en)
skos:notation
  • RIV/61389021:_____/13:00423871!RIV14-MSM-61389021
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • I, P(ED2.1.00/03.0079)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...iv/duvernostUdaju
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  • 96122
http://linked.open...ai/riv/idVysledku
  • RIV/61389021:_____/13:00423871
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  • photonometers (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [8CCD6AD5318C]
http://linked.open...v/mistoKonaniAkce
  • Liberec
http://linked.open...i/riv/mistoVydani
  • Cedex
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  • EPJ Web of Conferences: International Conference on Optics and Measurement, OAM 2012
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http://linked.open...vavai/riv/projekt
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  • Václavík, Jan
  • Jareš, Daniel
  • Oupický, Pavel
  • Vápenka, David
http://linked.open...vavai/riv/typAkce
http://linked.open...ain/vavai/riv/wos
  • 000326985500017
http://linked.open.../riv/zahajeniAkce
issn
  • 2100-014X
number of pages
http://bibframe.org/vocab/doi
  • 10.1051/epjconf/20134800018
http://purl.org/ne...btex#hasPublisher
  • EDP Sciences
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