About: Application of EUV optics to surface modification of materials

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We report results of experiments connected with surface modiﬁcation of materials with an intense extreme ultraviolet (EUV) laser beam. Irradiated by the laser beam from a discharge-plasma EUV source (with wavelength of 46.9 nm) based on a high-current capillary discharge driver, the samples have been investigated by atomic-force microscope (AFM). The laser beam is focused with a spherical Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered-PMMA and gallium arsenide (GaAs) samples. It turned out that desorption and ablation regimes, which are observed in all these cases strongly depends on substrate materials. We report results of experiments connected with surface modiﬁcation of materials with an intense extreme ultraviolet (EUV) laser beam. Irradiated by the laser beam from a discharge-plasma EUV source (with wavelength of 46.9 nm) based on a high-current capillary discharge driver, the samples have been investigated by atomic-force microscope (AFM). The laser beam is focused with a spherical Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered-PMMA and gallium arsenide (GaAs) samples. It turned out that desorption and ablation regimes, which are observed in all these cases strongly depends on substrate materials. (en)
Title	Application of EUV optics to surface modification of materials Application of EUV optics to surface modification of materials (en)
skos:prefLabel	Application of EUV optics to surface modification of materials Application of EUV optics to surface modification of materials (en)
skos:notation	RIV/61389021:_____/13:00395869!RIV14-MSM-61389021
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(LG13029)
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Prukner, Václav Štraus, Jaroslav Koláček, Karel Schmidt, Jiří Frolov, Oleksandr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav fyziky plazmatu AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	61721
http://linked.open...ai/riv/idVysledku	RIV/61389021:_____/13:00395869
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	EUV; laser; radiation; source; capillary discharge; plasma; ablation; surface modification (en)
http://linked.open.../riv/klicoveSlovo	source ablation laser plasma radiation EUV surface modification capillary discharge
http://linked.open...ontrolniKodProRIV	[B3CA1FCE84BC]
http://linked.open...v/mistoKonaniAkce	Prague
http://linked.open...i/riv/mistoVydani	Bellingham, Washington
http://linked.open...i/riv/nazevZdroje	Proceedings of SPIE 8777
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Research in the Frame of the Internatinal Center for Dense Magnetized Plasmas
http://linked.open...UplatneniVysledku	2013
http://linked.open...iv/tvurceVysledku	Choukourov, A. Frolov, Oleksandr Koláček, Karel Prukner, Václav Schmidt, Jiří Štraus, Jaroslav
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open...ain/vavai/riv/wos	000329577700005
http://linked.open.../riv/zahajeniAkce	2013-04-15 (xsd:date)
issn	0277-786X
number of pages	7 (xsd:int)
http://purl.org/ne...btex#hasPublisher	SPIE Press
https://schema.org/isbn	978-0-8194-9579-2

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