About: Non-thermal surface modification of solids induced by EUV laser pulses(ICOPS’2012, 1P-166)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Předneseno na konf.:Plasma Science(ICOPS), 2012 Abstracts IEEE International Conference on,Edinburgh,GB,08.07.2012-13.07.2012, We report results of experiments connected with surface modiﬁcation of organic and inorganic materials with an intense EUV laser beam. The samples were irradiated by laser beam from a discharge-plasma EUV source (with wavelength 46.9 nm) based on a high-current capillary discharge driver. A detailed description of our driver CAPEX can be found in the early published paper [1]. The laser beam is focused with a spherical (R=2100 mm) Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered-PMMA and gallium arsenide (GaAs) samples. For analysis of laser beam footprints an atomic-force microscope (AFM) was used. It turned out that the energy of focused EUV laser beam is sufficient for ablation not only easily ablative material PMMA but also thin layer of gold (thickness 40 nm) and GaAs by single shot, even if the focus is significantly Předneseno na konf.:Plasma Science(ICOPS), 2012 Abstracts IEEE International Conference on,Edinburgh,GB,08.07.2012-13.07.2012, We report results of experiments connected with surface modiﬁcation of organic and inorganic materials with an intense EUV laser beam. The samples were irradiated by laser beam from a discharge-plasma EUV source (with wavelength 46.9 nm) based on a high-current capillary discharge driver. A detailed description of our driver CAPEX can be found in the early published paper [1]. The laser beam is focused with a spherical (R=2100 mm) Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered-PMMA and gallium arsenide (GaAs) samples. For analysis of laser beam footprints an atomic-force microscope (AFM) was used. It turned out that the energy of focused EUV laser beam is sufficient for ablation not only easily ablative material PMMA but also thin layer of gold (thickness 40 nm) and GaAs by single shot, even if the focus is significantly (en)
Title	Non-thermal surface modification of solids induced by EUV laser pulses(ICOPS’2012, 1P-166) Non-thermal surface modification of solids induced by EUV laser pulses(ICOPS’2012, 1P-166) (en)
skos:prefLabel	Non-thermal surface modification of solids induced by EUV laser pulses(ICOPS’2012, 1P-166) Non-thermal surface modification of solids induced by EUV laser pulses(ICOPS’2012, 1P-166) (en)
skos:notation	RIV/61389021:_____/12:00386547!RIV13-AV0-61389021
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(LA08024), Z(AV0Z20430508)
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Prukner, Václav Štraus, Jaroslav Koláček, Karel Schmidt, Jiří Frolov, Oleksandr
http://linked.open.../riv/druhVysledku	O - Ostatní výsledky nezařaditelné do žádného z výše uvedených druhů výsledku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav fyziky plazmatu AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	154444
http://linked.open...ai/riv/idVysledku	RIV/61389021:_____/12:00386547
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Capillary discharge; EUV; laser; focusing; surface; modification; plasma; ablation (en)
http://linked.open.../riv/klicoveSlovo	modification focusing Capillary discharge ablation laser plasma surface EUV
http://linked.open...ontrolniKodProRIV	[42E3E72A5993]
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Research in the Frame of the International Center for Dense Magnetized Plasmas - ICDMP
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Choukourov, A. Frolov, Oleksandr Koláček, Karel Prukner, Václav Schmidt, Jiří Štraus, Jaroslav
http://linked.open...n/vavai/riv/zamer	Physical and chemical processes in plasmas and theis applications

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