About: Nano-structuring of solid surface by extreme ultraviolet Ar8+ laser

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	It is demonstrated the patterning of polymethylmethacrylate (PMMA) by ablation with Ar8+ ion laser (lambda = 46.9 nm) pumped by pulse, high-current, capillary-discharge. For focusing a long-focal spherical mirror (R = 2100 mm) covered by 14 double-layer Sc-Si coating was used. The ablated focal spots demonstrate not only that the energy of our laser is sufficient for such experiments, but also that the design of focusing optics must be more sophisticated: severe aberrations were revealed - an irregular spot shape and strong astigmatism with astigmatic difference as large as 16 mm. In some cases, on the bottom of ablated spots a laser-induced periodic surface structure appeared. Finally, an illumination of the sample through quadratic hole 7.5 x 7.5 mu m in grid, standing in contact with PMMA substrate ablated from the surface a strongly developed two-dimensional diffraction pattern (period in the center about 125 nm). It is demonstrated the patterning of polymethylmethacrylate (PMMA) by ablation with Ar8+ ion laser (lambda = 46.9 nm) pumped by pulse, high-current, capillary-discharge. For focusing a long-focal spherical mirror (R = 2100 mm) covered by 14 double-layer Sc-Si coating was used. The ablated focal spots demonstrate not only that the energy of our laser is sufficient for such experiments, but also that the design of focusing optics must be more sophisticated: severe aberrations were revealed - an irregular spot shape and strong astigmatism with astigmatic difference as large as 16 mm. In some cases, on the bottom of ablated spots a laser-induced periodic surface structure appeared. Finally, an illumination of the sample through quadratic hole 7.5 x 7.5 mu m in grid, standing in contact with PMMA substrate ablated from the surface a strongly developed two-dimensional diffraction pattern (period in the center about 125 nm). (en)
Title	Nano-structuring of solid surface by extreme ultraviolet Ar8+ laser Nano-structuring of solid surface by extreme ultraviolet Ar8+ laser (en)
skos:prefLabel	Nano-structuring of solid surface by extreme ultraviolet Ar8+ laser Nano-structuring of solid surface by extreme ultraviolet Ar8+ laser (en)
skos:notation	RIV/61389021:_____/12:00377054!RIV13-AV0-61389021
http://linked.open...avai/riv/aktivita	I P Z
http://linked.open...avai/riv/aktivity	I, P(KAN300100702), P(LA08024), P(LC528), Z(AV0Z20430508), Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Prukner, Václav Štraus, Jaroslav Koláček, Karel Schmidt, Jiří Frolov, Oleksandr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav fyziky plazmatu AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	152970
http://linked.open...ai/riv/idVysledku	RIV/61389021:_____/12:00377054
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Ablation by EUV radiation; application of Ar8+ laser; nano-patterning by EUV radiation; , nano-structuring by EUV radiation (en)
http://linked.open.../riv/klicoveSlovo	Ablation by EUV radiation application of Ar8+ laser nano-patterning by EUV radiation nano-structuring by EUV radiation
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[C2714C12AFAC]
http://linked.open...i/riv/nazevZdroje	Laser and Particle Beams
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	9 (xsd:int)
http://linked.open...vavai/riv/projekt	Creating and probing nanostructures with X-ray lasers Research in the Frame of the International Center for Dense Magnetized Plasmas - ICDMP Centre of Laser Plasma
http://linked.open...UplatneniVysledku	2012
http://linked.open...v/svazekPeriodika	30
http://linked.open...iv/tvurceVysledku	Fořt, Tomáš Holý, V. Sobota, Jaroslav Frolov, Oleksandr Koláček, Karel Prukner, Václav Schmidt, Jiří Shukurov, A. Štraus, Jaroslav
http://linked.open...ain/vavai/riv/wos	000302371200008
http://linked.open...n/vavai/riv/zamer	Physical and chemical processes in plasmas and theis applications Condensed Matter Physics – New Materials and Technologies
issn	0263-0346
number of pages	7 (xsd:int)
http://bibframe.org/vocab/doi	10.1017/S0263034611000681

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