About: Surface modification by EUV laser beam based on capillary discharge

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Many applications require surface modification and micro-structuring of polymers. For these purposes is mainly used ultraviolet (UV) radiation from excimer lamps or excimer lasers. However, these sources have a decided disadvantage - degrading the polymer deep inside due to relatively big radiation penetration depth which may exceed 100 μm. In contrast, extreme ultraviolet (EUV) radiation is absorbed in a layer approximately 100 nm thick only. In this work, the radiation from a discharge-plasma EUV source (with wavelength 46.9 nm) based on a capillary discharge driver is focused with a spherical Si/Sc multilayer mirror for surface modification of PMMA sample or thin gold layer (thickness about 40 nm). It was found that the focused EUV laser beam is capable by one shot to ablate PMMA or layer of gold, even if the focus is significantly influenced by astigmatism. Many applications require surface modification and micro-structuring of polymers. For these purposes is mainly used ultraviolet (UV) radiation from excimer lamps or excimer lasers. However, these sources have a decided disadvantage - degrading the polymer deep inside due to relatively big radiation penetration depth which may exceed 100 μm. In contrast, extreme ultraviolet (EUV) radiation is absorbed in a layer approximately 100 nm thick only. In this work, the radiation from a discharge-plasma EUV source (with wavelength 46.9 nm) based on a capillary discharge driver is focused with a spherical Si/Sc multilayer mirror for surface modification of PMMA sample or thin gold layer (thickness about 40 nm). It was found that the focused EUV laser beam is capable by one shot to ablate PMMA or layer of gold, even if the focus is significantly influenced by astigmatism. (en)
Title	Surface modification by EUV laser beam based on capillary discharge Surface modification by EUV laser beam based on capillary discharge (en)
skos:prefLabel	Surface modification by EUV laser beam based on capillary discharge Surface modification by EUV laser beam based on capillary discharge (en)
skos:notation	RIV/61389021:_____/11:00371236!RIV12-AV0-61389021
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(KAN300100702), P(LA08024), P(LC528), Z(AV0Z20430508)
http://linked.open...iv/cisloPeriodika	58
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Prukner, Václav Štraus, Jaroslav Koláček, Karel Schmidt, Jiří Frolov, Oleksandr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav fyziky plazmatu AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	233492
http://linked.open...ai/riv/idVysledku	RIV/61389021:_____/11:00371236
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	soft x-ray; EUV; laser; radiation; source; capillary; discharge; plasma; ablation; surface modification (en)
http://linked.open.../riv/klicoveSlovo	source capillary ablation discharge laser plasma radiation EUV soft x-ray surface modification
http://linked.open...odStatuVydavatele	AE - Stát Spojené arabské emiráty
http://linked.open...ontrolniKodProRIV	[596895910D41]
http://linked.open...i/riv/nazevZdroje	World Academy of Science, Engineering and Technology
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Creating and probing nanostructures with X-ray lasers Research in the Frame of the International Center for Dense Magnetized Plasmas - ICDMP Centre of Laser Plasma
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	-
http://linked.open...iv/tvurceVysledku	Frolov, Oleksandr Koláček, Karel Prukner, Václav Schmidt, Jiří Shukurov, A. Štraus, Jaroslav
http://linked.open...n/vavai/riv/zamer	Physical and chemical processes in plasmas and theis applications
issn	2010-376X
number of pages	4 (xsd:int)

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