About: Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery

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About: Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We report on the preparation and characterisation of boron (B) doped nano-crystalline diamond (BNCD) layers grown over large areas (up to 50cm x 30cm) and at low substrate temperatures (<650°C) using microwave plasma enhanced chemical vapour deposition apparatus with linear antenna delivery apparatus (MW-LA-PECVD). B-NCD layers were grown in H2/CH4/CO2 and H2/CH4 gas mixtures with added trimethylboron (TMB). Layers with thicknesses of 150nm to 1μm have been prepared with B/C ratios up to 15000ppm over a range of CO2/CH4 ratios to study the effect of oxygen (O) on the incorporation rate of B into the solid phase and the effect on the quality of the BNCD with respect to sp3/sp2 ratio. Experimental results show the reduction of boron acceptor concentration with increasing CO2 concentration. Higher sp3/sp2 ratios were measured by Raman spectroscopy with increasing TMB concentration in the gas phase without CO2. We report on the preparation and characterisation of boron (B) doped nano-crystalline diamond (BNCD) layers grown over large areas (up to 50cm x 30cm) and at low substrate temperatures (<650°C) using microwave plasma enhanced chemical vapour deposition apparatus with linear antenna delivery apparatus (MW-LA-PECVD). B-NCD layers were grown in H2/CH4/CO2 and H2/CH4 gas mixtures with added trimethylboron (TMB). Layers with thicknesses of 150nm to 1μm have been prepared with B/C ratios up to 15000ppm over a range of CO2/CH4 ratios to study the effect of oxygen (O) on the incorporation rate of B into the solid phase and the effect on the quality of the BNCD with respect to sp3/sp2 ratio. Experimental results show the reduction of boron acceptor concentration with increasing CO2 concentration. Higher sp3/sp2 ratios were measured by Raman spectroscopy with increasing TMB concentration in the gas phase without CO2. (en)
Title	Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery (en)
skos:prefLabel	Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery (en)
skos:notation	RIV/61389005:_____/14:00431502!RIV15-AV0-61389005
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(LM2011019), P(LM2011026)
http://linked.open...iv/cisloPeriodika	AUG
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Vacík, Jiří
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav jaderné fyziky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	25651
http://linked.open...ai/riv/idVysledku	RIV/61389005:_____/14:00431502
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	large area; low temperature; boron doped nano-crystalline diamond; linear antenna MW PE CVD (en)
http://linked.open.../riv/klicoveSlovo	large area boron doped nano-crystalline diamond linear antenna MW PE CVD low temperature
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[3ADA2DE9CCEC]
http://linked.open...i/riv/nazevZdroje	Diamond and Related Materials
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Laboratory of nanstructures and nanomaterials CANAM (Center of Accelerators and Nuclear Analytical Methods)
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	47
http://linked.open...iv/tvurceVysledku	Janíček, P. Jäger, Aleš Mistrík, J. Vacík, Jiří Hubík, Pavel Fekete, Ladislav Taylor, Andrew Mortet, Vincent
http://linked.open...ain/vavai/riv/wos	000340318100004
issn	0925-9635
number of pages	8 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.diamond.2014.05.002

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