About: Characterization of off-axis single target RF magnetron co-sputtered iron doped tin

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About: Characterization of off-axis single target RF magnetron co-sputtered iron doped tin Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The iron doped SnO2 coatings for sensor applications were studied by AFM, XPS, RBS and XRD techniques. The coatings were deposited by a magnetron sputtering from a single SnO2 target with an iron inset. Two different off-axis deposition arrangements were investigated. The iron concentration in the coating was controlled in the range from 0 up to 5 at.% by two basic external parameters, the fraction of the iron stripe directly in the erosion zone and the RF power. The deposition process was reproducible and deposited substoichiometric Fe:SnO2 films were homogenous, flat, amorphous and thermally stable up to post deposition annealing at 600 °C. The elevated deposition temperatures up to 400 °C and post annealing up to 600 °C for 10 min or 400 °C for 25 h had no significant influence on the composition, the topology and the structure of coatings. The iron dopant in the film has probably α-Fe2O3 bonding structure. The iron doped SnO2 coatings for sensor applications were studied by AFM, XPS, RBS and XRD techniques. The coatings were deposited by a magnetron sputtering from a single SnO2 target with an iron inset. Two different off-axis deposition arrangements were investigated. The iron concentration in the coating was controlled in the range from 0 up to 5 at.% by two basic external parameters, the fraction of the iron stripe directly in the erosion zone and the RF power. The deposition process was reproducible and deposited substoichiometric Fe:SnO2 films were homogenous, flat, amorphous and thermally stable up to post deposition annealing at 600 °C. The elevated deposition temperatures up to 400 °C and post annealing up to 600 °C for 10 min or 400 °C for 25 h had no significant influence on the composition, the topology and the structure of coatings. The iron dopant in the film has probably α-Fe2O3 bonding structure. (en)
Title	Characterization of off-axis single target RF magnetron co-sputtered iron doped tin Characterization of off-axis single target RF magnetron co-sputtered iron doped tin (en)
skos:prefLabel	Characterization of off-axis single target RF magnetron co-sputtered iron doped tin Characterization of off-axis single target RF magnetron co-sputtered iron doped tin (en)
skos:notation	RIV/61389005:_____/10:00353788!RIV11-MSM-61389005
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(KAN400720701), P(LC06041), Z(AV0Z10480505)
http://linked.open...iv/cisloPeriodika	-
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Malinský, Petr Macková, Anna
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav jaderné fyziky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	250430
http://linked.open...ai/riv/idVysledku	RIV/61389005:_____/10:00353788
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Magnetron co-sputtering; Off-axis deposition; Amorphous stannic oxide (en)
http://linked.open.../riv/klicoveSlovo	Magnetron co-sputtering Off-axis deposition Amorphous stannic oxide
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[676A9E1FC0DC]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Hierarchic nanosystems for microelektronics Preparation, modification and characterization of materials by energetic radiation.
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	205
http://linked.open...iv/tvurceVysledku	Kormunda, M. Macková, Anna Malinský, Petr Pavlík, J.
http://linked.open...ain/vavai/riv/wos	000286343200025
http://linked.open...n/vavai/riv/zamer	Jaderná fyzika a příbuzné obory v základním, aplikovaném a interdisciplinárním výzkumu
issn	0257-8972
number of pages	5 (xsd:int)

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