About: Simultaneous determination of the elastic modulus and density/thickness of ultrathin films utilizing micro-/nanoresonators under applied axial force     Goto   Sponge   NotDistinct   Permalink

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Description
  • Thin films are widely used in microelectronics, optics, filters, and various sensing devices. We propose a method to simultaneously determine the elastic modulus and density or thickness of ultrathin films deposited on various substrate materials. This methodology utilizes measurement of the resonant frequencies of the micro-/nanoresonator under intentionally applied axial tension and, consequently, the beam to string transition. Elastic modulus and density/thickness of thin film are obtained from the ratio between the resonant frequencies of the nanoresonator with and without applied axial force.
  • Thin films are widely used in microelectronics, optics, filters, and various sensing devices. We propose a method to simultaneously determine the elastic modulus and density or thickness of ultrathin films deposited on various substrate materials. This methodology utilizes measurement of the resonant frequencies of the micro-/nanoresonator under intentionally applied axial tension and, consequently, the beam to string transition. Elastic modulus and density/thickness of thin film are obtained from the ratio between the resonant frequencies of the nanoresonator with and without applied axial force. (en)
Title
  • Simultaneous determination of the elastic modulus and density/thickness of ultrathin films utilizing micro-/nanoresonators under applied axial force
  • Simultaneous determination of the elastic modulus and density/thickness of ultrathin films utilizing micro-/nanoresonators under applied axial force (en)
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  • Simultaneous determination of the elastic modulus and density/thickness of ultrathin films utilizing micro-/nanoresonators under applied axial force
  • Simultaneous determination of the elastic modulus and density/thickness of ultrathin films utilizing micro-/nanoresonators under applied axial force (en)
skos:notation
  • RIV/61388998:_____/14:00431785!RIV15-AV0-61388998
http://linked.open...avai/riv/aktivita
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  • I
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  • 12
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  • 45047
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  • RIV/61388998:_____/14:00431785
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  • elastic moduli; thin films; polymer films; vibration resonance; thin film deposition (en)
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  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [52BA8C8AF1E5]
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  • Journal of Applied Physics
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http://linked.open...UplatneniVysledku
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  • 115
http://linked.open...iv/tvurceVysledku
  • Zapoměl, Jaroslav
  • Stachiv, Ivo
  • Chen, Y.-L.
http://linked.open...ain/vavai/riv/wos
  • 000333901100070
issn
  • 0021-8979
number of pages
http://bibframe.org/vocab/doi
  • 10.1063/1.4869415
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