About: On angle resolved RF magnetron sputtering of Ge-Sb-Te thin films

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: On angle resolved RF magnetron sputtering of Ge-Sb-Te thin films Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Thin amorphous films of Ge-Sb-Te were deposited from Ge2Sb2Te5 target by RF (f=13.56 MHz) magnetron sputtering in argon plasma. Composition and chemical homogeneity of target and prepared thin films were traced by Energy Dispersive X-ray Analysis coupled with Scanning Electron Microscope (SEM-EDX). SEM technique was also used for surface morphology observation. Crystallinity of target and prepared thin films was studied by X-ray Diffraction (XRD). Optical parameters of prepared thin films (spectral dependence of refractive index, optical band gap energy E-g(opt)) and film thicknesses were established via Variable Angle Spectroscopic Ellipsometry (VASE) supported by UV-Vis-NIR spectroscopy. Influence of deposition conditions (RF power, At pressure, angle divergency from normal direction) to composition, crystallinity, optical properties and deposition rate was established. Thin amorphous films of Ge-Sb-Te were deposited from Ge2Sb2Te5 target by RF (f=13.56 MHz) magnetron sputtering in argon plasma. Composition and chemical homogeneity of target and prepared thin films were traced by Energy Dispersive X-ray Analysis coupled with Scanning Electron Microscope (SEM-EDX). SEM technique was also used for surface morphology observation. Crystallinity of target and prepared thin films was studied by X-ray Diffraction (XRD). Optical parameters of prepared thin films (spectral dependence of refractive index, optical band gap energy E-g(opt)) and film thicknesses were established via Variable Angle Spectroscopic Ellipsometry (VASE) supported by UV-Vis-NIR spectroscopy. Influence of deposition conditions (RF power, At pressure, angle divergency from normal direction) to composition, crystallinity, optical properties and deposition rate was established. (en)
Title	On angle resolved RF magnetron sputtering of Ge-Sb-Te thin films On angle resolved RF magnetron sputtering of Ge-Sb-Te thin films (en)
skos:prefLabel	On angle resolved RF magnetron sputtering of Ge-Sb-Te thin films On angle resolved RF magnetron sputtering of Ge-Sb-Te thin films (en)
skos:notation	RIV/61388980:_____/09:00341419!RIV10-MSM-61388980
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA203/06/1368), P(LC523), Z(AV0Z40320502), Z(AV0Z40500505)
http://linked.open...iv/cisloPeriodika	37-42
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Bezdička, Petr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav anorganické chemie AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	331330
http://linked.open...ai/riv/idVysledku	RIV/61388980:_____/09:00341419
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	amorphous semiconductors; films and coatings; sputtering (en)
http://linked.open.../riv/klicoveSlovo	films and coatings sputtering amorphous semiconductors
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[8837BCBE38B0]
http://linked.open...i/riv/nazevZdroje	Journal of Non-Crystalline Solids
http://linked.open...in/vavai/riv/obor	CA
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Perspective inorganic materials The preparation and study of amorphous chalcogenide films and their potential applications for optical recording and memories
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	355
http://linked.open...iv/tvurceVysledku	Bezdička, Petr Frumar, M. Wágner, T. Vlček, Milan Hrdlička, M. Gutwirth, J.
http://linked.open...ain/vavai/riv/wos	000270620900037
http://linked.open...n/vavai/riv/zamer	Design, syntéza a charakterizace klastrů, kompozitů, komplexů a dalších sloučenin na bázi anorganických látek; mechanismy a kinetika jejich interakcí Progresivní makromolekulární materiály a supramolekulární systémy: syntéza a studium vlastností, jevů a možností využití pro speciální aplikace a moderní technologie
issn	0022-3093
number of pages	4 (xsd:int)

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 38 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software