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  • Widespread Ni/SiC contact after annealing at high temperatures provides good ohmic contact. We managed to prepare Si/SiC annealed ohmic contacts with comparable qualities as Ni/SiC ones. However, the main benefit of these Si/SiC ohmic contacts lies in that they retain their ohmic properties even after they are etched off which brings grounds for promising secondary contacts. Etched contacts were analyzed by XPS and surface composition alteration was observed.
  • Widespread Ni/SiC contact after annealing at high temperatures provides good ohmic contact. We managed to prepare Si/SiC annealed ohmic contacts with comparable qualities as Ni/SiC ones. However, the main benefit of these Si/SiC ohmic contacts lies in that they retain their ohmic properties even after they are etched off which brings grounds for promising secondary contacts. Etched contacts were analyzed by XPS and surface composition alteration was observed. (en)
Title
  • Si ohmic contacts on N-type SiC
  • Si ohmic contacts on N-type SiC (en)
skos:prefLabel
  • Si ohmic contacts on N-type SiC
  • Si ohmic contacts on N-type SiC (en)
skos:notation
  • RIV/60461373:22810/11:43892657!RIV12-GA0-22810___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GAP108/11/0894)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 229171
http://linked.open...ai/riv/idVysledku
  • RIV/60461373:22810/11:43892657
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • ohmic contact; silicon; Silicon carbide (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [ED49560CDF2E]
http://linked.open...v/mistoKonaniAkce
  • Dresden
http://linked.open...i/riv/mistoVydani
  • Washington
http://linked.open...i/riv/nazevZdroje
  • IEEE Catalog Number CFP11/TR-CDR
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Cichoň, Stanislav
  • Macháč, Petr
  • Barda, Bohumil
  • Kudrnová, Marie
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
http://purl.org/ne...btex#hasPublisher
  • IEEE Electron Devices Society
https://schema.org/isbn
  • 978-1-4577-0501-4
http://localhost/t...ganizacniJednotka
  • 22810
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