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Description
  • We have developed a new alternative way for production of hybrid gold-copper stamps intended for fast and cheap replication of microfluidic structures. This novel technique relies on a polydimethylsiloxane (PDMS) casting process, transfer of microstructures into UV curable methyl-methacrylate (MMA) resin and galvanic deposition. The developed method enables an easy separation of fabricated metal stamps from plastic substrate (mechanical separation or wet etching in organic solvents), which favors this method over the metal stamp fabrication directly on SU8 substrate. The fabricated hybrid gold-copper stamps were tested as embossing templates for production of different microstructures. Their functionality was proven in production of microstructures for several applications, e.g.. AC electroosmotic micropumps or dielectrophoretic separators.
  • We have developed a new alternative way for production of hybrid gold-copper stamps intended for fast and cheap replication of microfluidic structures. This novel technique relies on a polydimethylsiloxane (PDMS) casting process, transfer of microstructures into UV curable methyl-methacrylate (MMA) resin and galvanic deposition. The developed method enables an easy separation of fabricated metal stamps from plastic substrate (mechanical separation or wet etching in organic solvents), which favors this method over the metal stamp fabrication directly on SU8 substrate. The fabricated hybrid gold-copper stamps were tested as embossing templates for production of different microstructures. Their functionality was proven in production of microstructures for several applications, e.g.. AC electroosmotic micropumps or dielectrophoretic separators. (en)
Title
  • Hybrid gold-copper stamp for rapid fabrication of microchips
  • Hybrid gold-copper stamp for rapid fabrication of microchips (en)
skos:prefLabel
  • Hybrid gold-copper stamp for rapid fabrication of microchips
  • Hybrid gold-copper stamp for rapid fabrication of microchips (en)
skos:notation
  • RIV/60461373:22340/12:43893628!RIV13-MSM-22340___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ED2.1.00/03.0088), P(IAA401280904), S
http://linked.open...iv/cisloPeriodika
  • 1
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 139945
http://linked.open...ai/riv/idVysledku
  • RIV/60461373:22340/12:43893628
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Microstructures; Fabrication; Hot embossing; Metal stamp (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [3FFE3F5DFAB9]
http://linked.open...i/riv/nazevZdroje
  • Microelectronic Engineering
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 98
http://linked.open...iv/tvurceVysledku
  • Slouka, Zdeněk
  • Šnita, Dalimil
  • Přibyl, Michal
  • Schrott, Walter
  • Červenka, Petr
http://linked.open...ain/vavai/riv/wos
  • 000309497200122
issn
  • 0167-9317
number of pages
http://bibframe.org/vocab/doi
  • 10.1016/j.mee.2012.07.030
http://localhost/t...ganizacniJednotka
  • 22340
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