About: Preparation of Si/SiC ohmic contacts in different environments

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The goal of our work was preparation of the Si/SiC type ohmic contacts under various conditions. Si/SiC contact structures annealed in an argon atmosphere are of worse contact resistivity in comparison with the same structures annealed under vacuum. Low Ar pressure annealing provides good surface morphology. The secondary contacts seem to combine only favorable characteristics of the two processes. The goal of our work was preparation of the Si/SiC type ohmic contacts under various conditions. Si/SiC contact structures annealed in an argon atmosphere are of worse contact resistivity in comparison with the same structures annealed under vacuum. Low Ar pressure annealing provides good surface morphology. The secondary contacts seem to combine only favorable characteristics of the two processes. (en)
Title	Preparation of Si/SiC ohmic contacts in different environments Preparation of Si/SiC ohmic contacts in different environments (en)
skos:prefLabel	Preparation of Si/SiC ohmic contacts in different environments Preparation of Si/SiC ohmic contacts in different environments (en)
skos:notation	RIV/60461373:22310/14:43898154!RIV15-GA0-22310___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GAP108/11/0894)
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Konrád, Peter Macháč, Petr Cichoň, Stanislav
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoká škola chemicko-technologická v Praze / Fakulta chemické technologie
http://linked.open...dnocenehoVysledku	39056
http://linked.open...ai/riv/idVysledku	RIV/60461373:22310/14:43898154
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Raman spectroscopy; silicon carbice; Si ohmic contacts (en)
http://linked.open.../riv/klicoveSlovo	Raman spectroscopy Si ohmic contacts silicon carbice
http://linked.open...ontrolniKodProRIV	[35D6E5C59F52]
http://linked.open...v/mistoKonaniAkce	Brno
http://linked.open...i/riv/mistoVydani	Brno
http://linked.open...i/riv/nazevZdroje	EDS'13 IMAPS CS International Conference Proceedings
http://linked.open...in/vavai/riv/obor	JJ
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Growth and processing of graphene layers on silicon carbide
http://linked.open...UplatneniVysledku	2014
http://linked.open...iv/tvurceVysledku	Cichoň, Stanislav Macháč, Petr Konrád, Peter
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2014-06-25 (xsd:date)
number of pages	4 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Vysoké učení technické v Brně
https://schema.org/isbn	978-80-214-4985-5
http://localhost/t...ganizacniJednotka	22310

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