About: XRD real structure characterization of sputtered Au films different in thickness

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: XRD real structure characterization of sputtered Au films different in thickness Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The thin gold films were prepared by DC plasma sputtering in argon atmosphere on glass substrates with different sputtering times. On experimental samples with thicknesses from 10 to 90 nm the XRD structural analysis was carried out in order to observe the real structure changes in dependence on the film thickness. The XRD analysis included calcula-tion of lattice parameters, biaxial stress and size of the crystallites and micro-strains. A sim-ple evaluation of preferred orientation of crystallites perpendicular to the sample surface using the integral intensities ratio of two strongest diffraction lines was also performed. The results show strong dependence of all parameters on thickness of Au films. The size of the crystallites is linearly increasing with growing film thickness whereas the lattice parameter is decreasing. The course of micro-strain and biaxial lattice stress is rapidly changing with increasing thickness of gold films due to relaxation of the structure. The thin gold films were prepared by DC plasma sputtering in argon atmosphere on glass substrates with different sputtering times. On experimental samples with thicknesses from 10 to 90 nm the XRD structural analysis was carried out in order to observe the real structure changes in dependence on the film thickness. The XRD analysis included calcula-tion of lattice parameters, biaxial stress and size of the crystallites and micro-strains. A sim-ple evaluation of preferred orientation of crystallites perpendicular to the sample surface using the integral intensities ratio of two strongest diffraction lines was also performed. The results show strong dependence of all parameters on thickness of Au films. The size of the crystallites is linearly increasing with growing film thickness whereas the lattice parameter is decreasing. The course of micro-strain and biaxial lattice stress is rapidly changing with increasing thickness of gold films due to relaxation of the structure. (en)
Title	XRD real structure characterization of sputtered Au films different in thickness XRD real structure characterization of sputtered Au films different in thickness (en)
skos:prefLabel	XRD real structure characterization of sputtered Au films different in thickness XRD real structure characterization of sputtered Au films different in thickness (en)
skos:notation	RIV/60461373:22310/11:43893001!RIV12-GA0-22310___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GA106/09/0125), P(GAP108/10/1106)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Švorčík, Václav Siegel, Jakub
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoká škola chemicko-technologická v Praze / Fakulta chemické technologie
http://linked.open...dnocenehoVysledku	242006
http://linked.open...ai/riv/idVysledku	RIV/60461373:22310/11:43893001
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	DC plasma sputtering; Au films; XRD analysis (en)
http://linked.open.../riv/klicoveSlovo	Au films DC plasma sputtering XRD analysis
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[B6CFF6399928]
http://linked.open...i/riv/nazevZdroje	Zeitschrift für Kristallographie Proceedings
http://linked.open...in/vavai/riv/obor	CD
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Preparation and characterization of metal/polymer structures The structure and properties of modified polymers for tissue engineering
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	Neuveden
http://linked.open...iv/tvurceVysledku	Kolská, Zdeňka Siegel, Jakub Šutta, P. Švorčík, Václav Říha, J.
issn	1869-1315
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1524/zkpr.2011.0032
http://localhost/t...ganizacniJednotka	22310

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 48 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software