About: Study of quantitative influence of sample defects on measurements of resistivity of thin films using van der Pauw method

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About: Study of quantitative influence of sample defects on measurements of resistivity of thin films using van der Pauw method Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The paper is devoted to the methodology of measurement of resistivity of thin films using van der Pauw (VDP) technique - in particular to the consequences of typical %22defects%22 that can appear in the samples. To a certain extent, it can be actually deduced from the measurement whether the defect is fatal, and the sample has to be excluded from the experimental results (incorrigible defect), or whether the error can be subsequently corrected numerically (corrigible defect). This is important especially for ultrathin films close to the limit of their connectivity, where the consequences of these defects can be easily mistaken for actual anomalous behaviour. Therefore, we decided to simulate the consequences of such defects experimentally. The paper is devoted to the methodology of measurement of resistivity of thin films using van der Pauw (VDP) technique - in particular to the consequences of typical %22defects%22 that can appear in the samples. To a certain extent, it can be actually deduced from the measurement whether the defect is fatal, and the sample has to be excluded from the experimental results (incorrigible defect), or whether the error can be subsequently corrected numerically (corrigible defect). This is important especially for ultrathin films close to the limit of their connectivity, where the consequences of these defects can be easily mistaken for actual anomalous behaviour. Therefore, we decided to simulate the consequences of such defects experimentally. (en)
Title	Study of quantitative influence of sample defects on measurements of resistivity of thin films using van der Pauw method Study of quantitative influence of sample defects on measurements of resistivity of thin films using van der Pauw method (en)
skos:prefLabel	Study of quantitative influence of sample defects on measurements of resistivity of thin films using van der Pauw method Study of quantitative influence of sample defects on measurements of resistivity of thin films using van der Pauw method (en)
skos:notation	RIV/60461373:22310/11:43891842!RIV12-MSM-22310___
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM6046137302), Z(MSM6046137306)
http://linked.open...iv/cisloPeriodika	10
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Náhlík, Josef Kašpárková, Irena
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoká škola chemicko-technologická v Praze / Fakulta chemické technologie
http://linked.open...dnocenehoVysledku	233108
http://linked.open...ai/riv/idVysledku	RIV/60461373:22310/11:43891842
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Incorrigible defects; Corrigible defects; Resistivity measurement; Van der Pauw (en)
http://linked.open.../riv/klicoveSlovo	Van der Pauw Corrigible defects Incorrigible defects Resistivity measurement
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[0A6E2C1182BF]
http://linked.open...i/riv/nazevZdroje	Measurement
http://linked.open...in/vavai/riv/obor	JB
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	44
http://linked.open...iv/tvurceVysledku	Fitl, Přemysl Náhlík, Josef Kašpárková, Irena
http://linked.open...ain/vavai/riv/wos	000297084400019
http://linked.open...n/vavai/riv/zamer	Preparation and research of functional materials and material technologies using micro- and nanoscopic methods Reakčně-transportní chemicko-inženýrské systémy a jejich dynamické chování, modelování a řízení chemických a biotechnologických procesů
issn	0263-2241
number of pages	12 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.measurement.2011.08.023
http://localhost/t...ganizacniJednotka	22310

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