About: Termodynamické aspekty přípravy epitaxních vrstev GaN:Cr metodou MOVPE     Goto   Sponge   NotDistinct   Permalink

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Description
  • On the basis of thermodynamic analysis of the Ga-Cr-N-C-H system, feasible conditions for the deposition of GaN:Cr epitaxial layers by MOVPE are discussed. The analysis was performed in the temperature range of 800 - 1100 °C at pressures ranging from 10 to 100 kPa for various input gas phase compositions. Solid (bcc) and liquid Cr-Ga solution, solid nitride (Ga,Cr)N as well as 12 single-species solid phases were considered to coexist in equilibrium with the gas phase. Initial conditions - temperature, pressure and input gas phase in the system and the content of Cr can be simply controlled by Cr concentration in the surrounding atmosphere. These conditions are supposed to be suitable for the deposition of high quality epitaxial layers of GaN:Cr.
  • On the basis of thermodynamic analysis of the Ga-Cr-N-C-H system, feasible conditions for the deposition of GaN:Cr epitaxial layers by MOVPE are discussed. The analysis was performed in the temperature range of 800 - 1100 °C at pressures ranging from 10 to 100 kPa for various input gas phase compositions. Solid (bcc) and liquid Cr-Ga solution, solid nitride (Ga,Cr)N as well as 12 single-species solid phases were considered to coexist in equilibrium with the gas phase. Initial conditions - temperature, pressure and input gas phase in the system and the content of Cr can be simply controlled by Cr concentration in the surrounding atmosphere. These conditions are supposed to be suitable for the deposition of high quality epitaxial layers of GaN:Cr. (en)
  • On the basis of thermodynamic analysis of the Ga-Cr-N-C-H system, feasible conditions for the deposition of GaN:Cr epitaxial layers by MOVPE are discussed. The analysis was performed in the temperature range of 800 - 1100 °C at pressures ranging from 10 to 100 kPa for various input gas phase compositions. Solid (bcc) and liquid Cr-Ga solution, solid nitride (Ga,Cr)N as well as 12 single-species solid phases were considered to coexist in equilibrium with the gas phase. Initial conditions - temperature, pressure and input gas phase in the system and the content of Cr can be simply controlled by Cr concentration in the surrounding atmosphere. These conditions are supposed to be suitable for the deposition of high quality epitaxial layers of GaN:Cr. (cs)
Title
  • Termodynamické aspekty přípravy epitaxních vrstev GaN:Cr metodou MOVPE
  • Thermodynamic aspects of GaN:Cr epitaxial layers grown by MOVPE (en)
  • Termodynamické aspekty přípravy epitaxních vrstev GaN:Cr metodou MOVPE (cs)
skos:prefLabel
  • Termodynamické aspekty přípravy epitaxních vrstev GaN:Cr metodou MOVPE
  • Thermodynamic aspects of GaN:Cr epitaxial layers grown by MOVPE (en)
  • Termodynamické aspekty přípravy epitaxních vrstev GaN:Cr metodou MOVPE (cs)
skos:notation
  • RIV/60461373:22310/07:00018272!RIV08-MSM-22310___
http://linked.open.../vavai/riv/strany
  • 79-84
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA104/06/0642), Z(MSM6046137302)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 454728
http://linked.open...ai/riv/idVysledku
  • RIV/60461373:22310/07:00018272
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • GaN; dilute magnetic semiconductors; spintronics; thermodynamics (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [06BF53D8B073]
http://linked.open...i/riv/mistoVydani
  • Plzeň
http://linked.open...i/riv/nazevZdroje
  • Sborník příspěvků VI. ročníku konference Vrstvy a povlaky 2007
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Sofer, Zdeněk
  • Leitner, Jindřich
  • Sedmidubský, David
  • Stejskal, Josef
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Digital Graphic
https://schema.org/isbn
  • 978-80-969310-4-0
http://localhost/t...ganizacniJednotka
  • 22310
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