About: New method for the in situ determination of AlxGa1-xN composition in MOVPE by real-time optical reflectance     Goto   Sponge   NotDistinct   Permalink

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  • This paper reports on the in situ determination of the Al-content in AlxGa1?xN layers deposited by MOVPE on sapphire and silicon substrates by means of optical reflectance. The accuracy of the conventional in situ method which utilizes the dependence of the refractive index and the extinction coefficient on Alcontent is compared to that of the new dispersion approach. The limits and possibilities of the new approach will be discussed.
  • This paper reports on the in situ determination of the Al-content in AlxGa1?xN layers deposited by MOVPE on sapphire and silicon substrates by means of optical reflectance. The accuracy of the conventional in situ method which utilizes the dependence of the refractive index and the extinction coefficient on Alcontent is compared to that of the new dispersion approach. The limits and possibilities of the new approach will be discussed. (en)
Title
  • New method for the in situ determination of AlxGa1-xN composition in MOVPE by real-time optical reflectance
  • New method for the in situ determination of AlxGa1-xN composition in MOVPE by real-time optical reflectance (en)
skos:prefLabel
  • New method for the in situ determination of AlxGa1-xN composition in MOVPE by real-time optical reflectance
  • New method for the in situ determination of AlxGa1-xN composition in MOVPE by real-time optical reflectance (en)
skos:notation
  • RIV/60461373:22310/06:00022514!RIV10-MSM-22310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • S
http://linked.open...iv/cisloPeriodika
  • 7
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 488538
http://linked.open...ai/riv/idVysledku
  • RIV/60461373:22310/06:00022514
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Gallium nitride; epitaxy; in-situ; composition (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV
  • [4C9F849BB138]
http://linked.open...i/riv/nazevZdroje
  • Phys.Status Solidi A
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 203
http://linked.open...iv/tvurceVysledku
  • Sofer, Zdeněk
  • Jansen, R. H.
  • Hardtdegen, Hilde
  • Cho, Yong Suk
  • Heuken, M.
  • Bimberg, D.
  • Kaluza, Nicoleta
  • Steins, Roger
  • Bay, H. L.
  • Dikme, Y.
  • Kalisch, H.
  • Reissmann, L.
  • Strittmatter, A.
  • Zettler, J.-T.
http://linked.open...ain/vavai/riv/wos
  • 000238034600026
issn
  • 0031-8965
number of pages
http://localhost/t...ganizacniJednotka
  • 22310
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