About: Thermodynamic aspects of carbon incorporation into AlN epitaxial layers grown by MOVPE

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Thermodynamic aspects of carbon incorporation into AlN during the MOVPE growth are discussed. Under low potential in the gaseous phase, carbon dissolves in AlN substituting nitrogen atoms. A sublattice model has been proposed to describe the thermodynamic behavior of this pseudobinary solution AlN-C. When carbon potential increases, solid graphite is formed simultaneously to AlN. At V/III input ratio (V/III = xoNH3/xoTMAl) greater than one, carbonitride Al5C3N as well carbide Al4C3 can be formed. The calculated results are compared with the composition of AlN layers growth by MOVPE. The serious discrepancies exist which can be explained by the crude nature of the solution model as well as by non-equilibrium conditions during the MOVPE growth and subsequent carbon supersaturation of the resulting layers. Thermodynamic aspects of carbon incorporation into AlN during the MOVPE growth are discussed. Under low potential in the gaseous phase, carbon dissolves in AlN substituting nitrogen atoms. A sublattice model has been proposed to describe the thermodynamic behavior of this pseudobinary solution AlN-C. When carbon potential increases, solid graphite is formed simultaneously to AlN. At V/III input ratio (V/III = xoNH3/xoTMAl) greater than one, carbonitride Al5C3N as well carbide Al4C3 can be formed. The calculated results are compared with the composition of AlN layers growth by MOVPE. The serious discrepancies exist which can be explained by the crude nature of the solution model as well as by non-equilibrium conditions during the MOVPE growth and subsequent carbon supersaturation of the resulting layers. (en) Termodynamické aspekty zabudování uhlíku do epitaxních vrstev AlN připravených technologií MOVPE (cs)
Title	Thermodynamic aspects of carbon incorporation into AlN epitaxial layers grown by MOVPE Termodynamické aspekty zabudování uhlíku do epitaxních vrstev AlN připravených technologií MOVPE (cs) Thermodynamic aspects of carbon incorporation into AlN epitaxial layers grown by MOVPE (en)
skos:prefLabel	Thermodynamic aspects of carbon incorporation into AlN epitaxial layers grown by MOVPE Termodynamické aspekty zabudování uhlíku do epitaxních vrstev AlN připravených technologií MOVPE (cs) Thermodynamic aspects of carbon incorporation into AlN epitaxial layers grown by MOVPE (en)
skos:notation	RIV/60461373:22310/05:00013735!RIV06-MSM-22310___
http://linked.open.../vavai/riv/strany	2504
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA104/03/0387), Z(MSM6046137302)
http://linked.open...iv/cisloPeriodika	7
http://linked.open...vai/riv/dodaniDat	2006
http://linked.open...aciTvurceVysledku	Leitner, Jindřich Stejskal, Josef Sofer, Zdeněk
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoká škola chemicko-technologická v Praze / Fakulta chemické technologie
http://linked.open...dnocenehoVysledku	546710
http://linked.open...ai/riv/idVysledku	RIV/60461373:22310/05:00013735
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	MOVPE; AlN; Nitrides; Carbon Incorporation; Contamination; Thermodynamic (en)
http://linked.open.../riv/klicoveSlovo	Thermodynamic AlN Contamination MOVPE Nitrides Carbon Incorporation
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[FA01057A5A91]
http://linked.open...i/riv/nazevZdroje	Physica Status Solidi (c)
http://linked.open...in/vavai/riv/obor	CA
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Chemical aspects of thin layer deposition of the AIII-nitrides in relation to electronic applications
http://linked.open...UplatneniVysledku	2005
http://linked.open...iv/tvurceVysledku	Sofer, Zdeněk Leitner, Jindřich Stejskal, Josef
http://linked.open...n/vavai/riv/zamer	Preparation and research of functional materials and material technologies using micro- and nanoscopic methods
issn	1610-1634
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	22310

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