About: Photocatalytic Activity of TiOx Films Deposited by PECVD with Heating Cathod     Goto   Sponge   NotDistinct   Permalink

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  • This contribution deals with deposition of TiOx films by the pulsed PECVD method. The experiments were performed in a planar reactor with powered heatable substrate holder. Oxygen was used as a working gas and Titan-IV-iso-propoxid as a precursor. During this process, the cathode was heating in the range 150 ? 450 °C. The photocatalytic activity of the films was tested in a home made reactor. The contact angle of the as-deposited films and films after illumination by UV light was determined from the contact angle measurements. The influence of the duty time, pulsed frequency and substrate temperature was studied.
  • This contribution deals with deposition of TiOx films by the pulsed PECVD method. The experiments were performed in a planar reactor with powered heatable substrate holder. Oxygen was used as a working gas and Titan-IV-iso-propoxid as a precursor. During this process, the cathode was heating in the range 150 ? 450 °C. The photocatalytic activity of the films was tested in a home made reactor. The contact angle of the as-deposited films and films after illumination by UV light was determined from the contact angle measurements. The influence of the duty time, pulsed frequency and substrate temperature was studied. (en)
Title
  • Photocatalytic Activity of TiOx Films Deposited by PECVD with Heating Cathod
  • Photocatalytic Activity of TiOx Films Deposited by PECVD with Heating Cathod (en)
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  • Photocatalytic Activity of TiOx Films Deposited by PECVD with Heating Cathod
  • Photocatalytic Activity of TiOx Films Deposited by PECVD with Heating Cathod (en)
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  • RIV/60076658:12410/10:00011652!RIV11-MSM-12410___
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  • P(KAN101120701), V
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  • 278796
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  • RIV/60076658:12410/10:00011652
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  • photocatalysis; PECVD; heating cathode; contact angle measurements (en)
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  • [2643D3147C83]
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  • Praha
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  • Praha
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  • In: Krýsa, J. (ed.): Proceedings of the 6th European Meeting on Solar Chemistry and Photocatalysis: Environmental Applications
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  • Kříž, Pavel
  • Horáková, Marta
  • Špatenka, Petr
  • Michalčík, Zdeněk
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  • Vysoká škola chemicko-technologická v Praze
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  • 978-80-7080-750-7
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  • 12410
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