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| Description
| - An one-dimensional hybrid model of RF discharge in low-temperature argon plasma is presented in our paper. The hybrid model consists of two parts- particle model which simulate fast electrons while fluid model simulates slow electrons and positive argon ions. In the particle model the positions and velocities of fast electrons are calculated by mean of deterministic Verlet algorithm while the collision processes are treated by the stochastic way. For the solution of fluid equations, for slow electrons and positive argon ions, the Scharfetter-Gummel exponential algorithm was use. Typical results of our calculations presented in this paper are total RF current and RF voltage waveforms on the planar substrate immersed into argon plasma. The next results which can be found here are the ion, electron and displacement current waveforms on the substrate.
- An one-dimensional hybrid model of RF discharge in low-temperature argon plasma is presented in our paper. The hybrid model consists of two parts- particle model which simulate fast electrons while fluid model simulates slow electrons and positive argon ions. In the particle model the positions and velocities of fast electrons are calculated by mean of deterministic Verlet algorithm while the collision processes are treated by the stochastic way. For the solution of fluid equations, for slow electrons and positive argon ions, the Scharfetter-Gummel exponential algorithm was use. Typical results of our calculations presented in this paper are total RF current and RF voltage waveforms on the planar substrate immersed into argon plasma. The next results which can be found here are the ion, electron and displacement current waveforms on the substrate. (en)
- V článku je prezentován 1D model elektrického výboje v nízkoteplotním argonovém plazmatu. Hybridní model sestává ze dvou částí ? částicového modelu, který simuluje rychlé elektrony a spojitého modelu simulujícího pomalé elektrony a ionty. V částicovém modelu jsou polohy a rychlosti částic určovány deterministicky Verletovo algoritmem, srážkové procesy jsou zavedeny stochastickými metodami. Rovnice spojitého modelu jsou řešeny pomocí Scharfetter-Gummelova exponenciálního schématu. Z výsledků je prezentován například celkový proud a napětí na rovinném substrátu, který je vložen do plazmatu. Dále jsou studovány iontové a elektronové vlny v okolí substrátu. (cs)
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| Title
| - Modelling of RF discharge in argon plasma
- Modelling of RF discharge in argon plasma (en)
- Počítačové modelování RF výboje v argonovém plazmatu (cs)
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| skos:prefLabel
| - Modelling of RF discharge in argon plasma
- Modelling of RF discharge in argon plasma (en)
- Počítačové modelování RF výboje v argonovém plazmatu (cs)
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| skos:notation
| - RIV/60076658:12410/08:00009199!RIV09-AV0-12410___
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| http://linked.open...avai/riv/aktivita
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| http://linked.open...avai/riv/aktivity
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| http://linked.open...vai/riv/dodaniDat
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| http://linked.open...aciTvurceVysledku
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| http://linked.open.../riv/druhVysledku
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| http://linked.open...iv/duvernostUdaju
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| http://linked.open...titaPredkladatele
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| http://linked.open...dnocenehoVysledku
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| http://linked.open...ai/riv/idVysledku
| - RIV/60076658:12410/08:00009199
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| http://linked.open...riv/jazykVysledku
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| http://linked.open.../riv/klicovaSlova
| - Particle modelling; fluid modelling; hybrid modelling; argon plasma; RF plasma (en)
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| http://linked.open.../riv/klicoveSlovo
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| http://linked.open...ontrolniKodProRIV
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| http://linked.open...i/riv/mistoVydani
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| http://linked.open...i/riv/nazevZdroje
| - Computational Methods in Sciences and Engineering
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| http://linked.open...in/vavai/riv/obor
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| http://linked.open...ichTvurcuVysledku
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| http://linked.open...cetTvurcuVysledku
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| http://linked.open...vavai/riv/projekt
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| http://linked.open...UplatneniVysledku
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| http://linked.open...iv/tvurceVysledku
| - Jelínek, Petr
- Bartoš, Petr
- Hubička, Z.
- Virostko, P.
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| number of pages
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| http://purl.org/ne...btex#hasPublisher
| - American Institute of Physics
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| https://schema.org/isbn
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| http://localhost/t...ganizacniJednotka
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