About: Investigation of pulsed magnetron discharge at different frequencies during deposition of TiOx thin films     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • Parametry DC magnetronu v pulzním režimu byly studovány metodou Langmuirovské sondy. Výboj byl generován ve směsi Ar/O2. Byly určeny okamžité hodnoty plazmového potenciálu, a koncentrace a teploty elektronů v závislosti na puzní frekvenci. (cs)
  • The dc planar magnetron, used for deposition of TiOx thin films, was operated in pulsed regime. The magnetron system was equipped by Ti target, discharge was created from mixture of Ar (19 sccm) and reactive admixture O2 (0.3 sccm). The repetition frequency was varied from 250 Hz up to 6.3 kHz with the same length of active part Tactive = 150 mikrosec. The average current was kept constant in all measurements at Iav = 550 mA. The generated plasma was investigated by time-resolved Langmuir probe measurements and time-resolved photon counting measurements. Plasma density, plasma potential, electron temperature and discharge current were main quantities of our interest.
  • The dc planar magnetron, used for deposition of TiOx thin films, was operated in pulsed regime. The magnetron system was equipped by Ti target, discharge was created from mixture of Ar (19 sccm) and reactive admixture O2 (0.3 sccm). The repetition frequency was varied from 250 Hz up to 6.3 kHz with the same length of active part Tactive = 150 mikrosec. The average current was kept constant in all measurements at Iav = 550 mA. The generated plasma was investigated by time-resolved Langmuir probe measurements and time-resolved photon counting measurements. Plasma density, plasma potential, electron temperature and discharge current were main quantities of our interest. (en)
Title
  • Investigation of pulsed magnetron discharge at different frequencies during deposition of TiOx thin films
  • Studium pulzního magnetronového výboje za různých frekvencí během depozice TiOx tenkých vrstev (cs)
  • Investigation of pulsed magnetron discharge at different frequencies during deposition of TiOx thin films (en)
skos:prefLabel
  • Investigation of pulsed magnetron discharge at different frequencies during deposition of TiOx thin films
  • Studium pulzního magnetronového výboje za různých frekvencí během depozice TiOx tenkých vrstev (cs)
  • Investigation of pulsed magnetron discharge at different frequencies during deposition of TiOx thin films (en)
skos:notation
  • RIV/60076658:12410/07:00008091!RIV08-GA0-12410___
http://linked.open.../vavai/riv/strany
  • 263-264
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/05/2242)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 427486
http://linked.open...ai/riv/idVysledku
  • RIV/60076658:12410/07:00008091
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • pulsed magnetron; plasma diagnostic; Langmuir probe (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [DDDE9B59FB1A]
http://linked.open...i/riv/mistoVydani
  • Bratislava
http://linked.open...i/riv/nazevZdroje
  • In: Matuška, J., Matějčík, S., Skalný, J.D. (ed.): Proceedings of SAPP XVI, 2007
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Adámek, Petr
  • Blažek, Josef
  • Hippler, R.
  • Straňák, Vítězslav
  • Tichý, Milan
  • Hubička, Z.
  • Virostko, P.
  • Wrehde, S.
number of pages
http://purl.org/ne...btex#hasPublisher
  • Univerzita Komenského v Bratislave
https://schema.org/isbn
  • 978-80-89186-13-6
http://localhost/t...ganizacniJednotka
  • 12410
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software