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  • In this work behavior of active particles during process of plasma polymerization by PECVD method was investigated. Experimental and theoretical part of the study were carried out simultaneously. Measurements were taken on the specially constructed closed-slot substrate. Thanks to this substrate design, penetration of the active particles during the deposition could be measured. Theoretical part consisted of the mathematical model developement and its implementation as a computer simulation.
  • In this work behavior of active particles during process of plasma polymerization by PECVD method was investigated. Experimental and theoretical part of the study were carried out simultaneously. Measurements were taken on the specially constructed closed-slot substrate. Thanks to this substrate design, penetration of the active particles during the deposition could be measured. Theoretical part consisted of the mathematical model developement and its implementation as a computer simulation. (en)
  • V práci studujeme experimentálně i teoreticky (počítačové simulace) procesy probíhající při polymerizaci metodou PECVD. Měření byla provedena za pomoci speciálně zkonstruovaného substrátu, který umožňuje díky svému uspořádání studovat fyzikální procesy, které se významným způsobem uplatňují při depozici tenkých vrstev. Teoretická část je koncipována jako matematický model, který je následně řešen numerickými metodami. (cs)
Title
  • Studium penetrace aktivních částic metodou PECVD (cs)
  • Study of active particles penetration by PECVD method
  • Study of active particles penetration by PECVD method (en)
skos:prefLabel
  • Studium penetrace aktivních částic metodou PECVD (cs)
  • Study of active particles penetration by PECVD method
  • Study of active particles penetration by PECVD method (en)
skos:notation
  • RIV/60076658:12410/07:00008074!RIV08-AV0-12410___
http://linked.open...avai/riv/aktivita
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  • P(KAN101120701)
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  • 453216
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  • RIV/60076658:12410/07:00008074
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  • PECVD method; computer simulations (en)
http://linked.open.../riv/klicoveSlovo
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  • [45A46775A083]
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  • Liberec
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  • CD ROM
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  • Technická univerzita Liberec
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http://linked.open...iv/tvurceVysledku
  • Bartoš, Petr
  • Špatenka, Petr
  • Sedláková, L.
https://schema.org/isbn
  • 978-80-7372-256-2
http://localhost/t...ganizacniJednotka
  • 12410
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