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Description
  • Proces PECVD při depozici uhlíkových nanotrubic byl studován prostřednictvím Langmuirovy sondy a optické spektroskopie. Elektronová hustota a teplota a potenciál plazmatu byly analyzovány ve vztahu k napětí výboje a teplotě substrátu. Výsledky jsou diskutovány v souvislosti s podmínkami růstu nanotrubic. Je ukázáno, že produkce těžkých částic probíhá především v příelektrodové oblasti, v blízkosti substrátu o záporném napětí. Modelové výpočty demonstrují vliv elektrických sil na zarovnaný růst nanotrubic a stanovují optimální podmínky pro polní emisi elektronů z jejich zakončení. (cs)
  • The plasma enhanced hot filament chemical vapor deposition used for deposition of carbon nanotubes was investigated using Langmuir probes and optical emission spectroscopy. The electron density, electron temperature and plasma potential were measured in relation to the discharge voltage and substrate temperature. The results are discussed in connection with the conditions for the nanotubes' growth. It is demonstrated that the production of reactive heavy particles takes place predominantly in the sheath region, close to the negative biased substrate. Model calculations demonstrate the role of the electrical forces on the aligned growth of nanotubes and optimum properties for electron field emission from the nanotube tips.
  • The plasma enhanced hot filament chemical vapor deposition used for deposition of carbon nanotubes was investigated using Langmuir probes and optical emission spectroscopy. The electron density, electron temperature and plasma potential were measured in relation to the discharge voltage and substrate temperature. The results are discussed in connection with the conditions for the nanotubes' growth. It is demonstrated that the production of reactive heavy particles takes place predominantly in the sheath region, close to the negative biased substrate. Model calculations demonstrate the role of the electrical forces on the aligned growth of nanotubes and optimum properties for electron field emission from the nanotube tips. (en)
Title
  • Experimental and Theoretical Investigation of Plasma Enhanced Hot filament Chemical Vapour Deposition of Carbon Nanotubes
  • Experimentální a teoretický výzkum depozice uhlíkových nanotrubic metodou PE CVD (cs)
  • Experimental and Theoretical Investigation of Plasma Enhanced Hot filament Chemical Vapour Deposition of Carbon Nanotubes (en)
skos:prefLabel
  • Experimental and Theoretical Investigation of Plasma Enhanced Hot filament Chemical Vapour Deposition of Carbon Nanotubes
  • Experimentální a teoretický výzkum depozice uhlíkových nanotrubic metodou PE CVD (cs)
  • Experimental and Theoretical Investigation of Plasma Enhanced Hot filament Chemical Vapour Deposition of Carbon Nanotubes (en)
skos:notation
  • RIV/60076658:12410/05:00006411!RIV06-MSM-12410___
http://linked.open.../vavai/riv/strany
  • 58-62
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 124100004)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 521013
http://linked.open...ai/riv/idVysledku
  • RIV/60076658:12410/05:00006411
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • carbon nanotube; PECVD; plasma diagnostics; model calculations; field emission (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [33A481A9688E]
http://linked.open...i/riv/mistoVydani
  • Ankara
http://linked.open...i/riv/nazevZdroje
  • In: M. Mutlu, G. Dinescu, R. Förch, J.M.M. Martinez, J. Vyskocil (Eds) Plasma Polymers and Related Materials
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Blažek, Josef
  • Špatenka, Petr
  • Leonhardt, Albert
  • Taeschner, Ch.
  • Pácal, F.
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Hacettepe University Press
https://schema.org/isbn
  • 975-491-194-0
http://localhost/t...ganizacniJednotka
  • 12410
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