About: Comparative diagnostics of Ar and He surfatron generated plasma by means of optical emission spectroscopy and probe measurements     Goto   Sponge   NotDistinct   Permalink

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Description
  • Článek je zaměřen na srovnávací diagnostiku mikrovlnného plazmatu, generovaného surfatronem, kde Ar a He představují nosný plyn a N2 je použit jako reaktivní příměs. Diagnostikovaný mikrovlnný zdroj je představován surfatronem napájeným mikrovlnným zdrojem pracujícím s frekvencí 2.45 GHz s výstupním výkonem v rozsahu 0-300 W, který generuje plazma z proudícího plynu v křemenné trubici. Rychlost proudícího plynu je konstantní (obvykle 600 sccm), ale poměr reaktivního plynu je měněn. V článku jsou prezentovány některé výsledky diagnostiky generovaného plazmatu hořícího uvnitř trubice i v trubici v závislosti na různých experimentálních podmínkách: proměnný absorbovaný výkon, tlak v pracovní komoře atd. Diagnostika plazmatu byla provedena pomocí měření s dvojicí sond (elektronová teplota vypočtená z naměřených dat) a pomocí optické emisní spektroskopie (rotační a vibrační teploty, odhad chemického složení výboje z přehledového spektra). (cs)
  • The article is focused on comparative diagnostics of microwave plasmas, generated by surfatron, where Ar and He are used as carrier gases N2 is used as reactive gas. The diagnosed microwave-driven plasma source consists of a surfatron powered by a microwave magnetron generator, working at frequency 2.45 GHz in the output power range 0-300 W, which creates plasma from the flowing working gas in a quartz nozzle. The gas flow rate is kept typically constant at 600 sccm but ratio of carrier gas and reactive gas is varied. We present some results of diagnostics of generated plasma at nozzle exit as well as in the nozzle at different experimental conditions: variable absorbed power, total chamber pressure etc. The diagnostics of plasma column was performed by means of double probe measurement (mainly electron temperature is calculated from measured data) and by optical emission spectroscopy (rotational and vibrational temperatures, estimation of plasma composition from overview spectra).
  • The article is focused on comparative diagnostics of microwave plasmas, generated by surfatron, where Ar and He are used as carrier gases N2 is used as reactive gas. The diagnosed microwave-driven plasma source consists of a surfatron powered by a microwave magnetron generator, working at frequency 2.45 GHz in the output power range 0-300 W, which creates plasma from the flowing working gas in a quartz nozzle. The gas flow rate is kept typically constant at 600 sccm but ratio of carrier gas and reactive gas is varied. We present some results of diagnostics of generated plasma at nozzle exit as well as in the nozzle at different experimental conditions: variable absorbed power, total chamber pressure etc. The diagnostics of plasma column was performed by means of double probe measurement (mainly electron temperature is calculated from measured data) and by optical emission spectroscopy (rotational and vibrational temperatures, estimation of plasma composition from overview spectra). (en)
Title
  • Comparative diagnostics of Ar and He surfatron generated plasma by means of optical emission spectroscopy and probe measurements
  • Comparative diagnostics of Ar and He surfatron generated plasma by means of optical emission spectroscopy and probe measurements (en)
  • Srovnácí diagnostika surfatrového výboje v Ar a He pomocí optické emisní spektroskopie a sondových měření (cs)
skos:prefLabel
  • Comparative diagnostics of Ar and He surfatron generated plasma by means of optical emission spectroscopy and probe measurements
  • Comparative diagnostics of Ar and He surfatron generated plasma by means of optical emission spectroscopy and probe measurements (en)
  • Srovnácí diagnostika surfatrového výboje v Ar a He pomocí optické emisní spektroskopie a sondových měření (cs)
skos:notation
  • RIV/60076658:12410/04:00005562!RIV/2005/MSM/124105/N
http://linked.open.../vavai/riv/strany
  • -
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 124100004)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 558153
http://linked.open...ai/riv/idVysledku
  • RIV/60076658:12410/04:00005562
http://linked.open...riv/jazykVysledku
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  • optical emission spectroscopy;surfatron;2.45 GHz;argon;helium (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [BC55855D360C]
http://linked.open...v/mistoKonaniAkce
  • Nice, France
http://linked.open...i/riv/mistoVydani
  • Cadarache
http://linked.open...i/riv/nazevZdroje
  • In: HAL (Hyper Article on Line) (http://hal.ccsd.cnrs.fr/docs/00/00/25/06/PDF/ICPP2004.pdf, e-Proc. of 12th ICPP
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Slavíček, P.
  • Straňák, Vítězslav
  • Špatenka, Petr
  • Tichý, Milan
  • Šerý, Michal
  • Navrátil, Z.
  • Trunec, D.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Association Euratom-CEA
http://localhost/t...ganizacniJednotka
  • 12410
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