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Description
| - The study of the working gas flow and its interaction with the substrate is an important part of diagnostics of plasma in the plasma-chemical reactors. Good knowledge of the parameters of plasma is necessary to understand to processes that take place at plasma-chemical deposition of thin films. We have used the optical diagnostics by holographic interferometer for this purpose. The boundary between subsonic and supersonic flowing gas has been determined by means of interferograms. The distribution of the phase shift into the observed object compared to the state without flowing gas has been determined from the interferogram as well. That gives the possibility of another work purposeful obtaining distribution of mass density into the flowing gas and temperature or pressure, respectively. Studium proudění pracovního plynu a jeho interakce se substrátem jsou důležité části diagnostiky plazmatu v plasma-chemických reaktorech. Dobrá znalost parametrů plazmatu je nutná k pochopení procesů, které probíhají
- The study of the working gas flow and its interaction with the substrate is an important part of diagnostics of plasma in the plasma-chemical reactors. Good knowledge of the parameters of plasma is necessary to understand to processes that take place at plasma-chemical deposition of thin films. We have used the optical diagnostics by holographic interferometer for this purpose. The boundary between subsonic and supersonic flowing gas has been determined by means of interferograms. The distribution of the phase shift into the observed object compared to the state without flowing gas has been determined from the interferogram as well. That gives the possibility of another work purposeful obtaining distribution of mass density into the flowing gas and temperature or pressure, respectively. Studium proudění pracovního plynu a jeho interakce se substrátem jsou důležité části diagnostiky plazmatu v plasma-chemických reaktorech. Dobrá znalost parametrů plazmatu je nutná k pochopení procesů, které probíhají (en)
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Title
| - Numerical Methods Concerning Optical Diagnostics of Low Temperature Plasmas
- Numerical Methods Concerning Optical Diagnostics of Low Temperature Plasmas (en)
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skos:prefLabel
| - Numerical Methods Concerning Optical Diagnostics of Low Temperature Plasmas
- Numerical Methods Concerning Optical Diagnostics of Low Temperature Plasmas (en)
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skos:notation
| - RIV/60076658:12410/01:00003046!RIV/2002/MSM/124102/N
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/60076658:12410/01:00003046
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - holographic interferometry, phase shift, discrete Fourier transformation (holografická interferometrie, fázové posunutí, diskrétní Fourierova transformace) (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...ocetUcastnikuAkce
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http://linked.open...nichUcastnikuAkce
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Blažek, Josef
- Kříž, Pavel
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
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https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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