The paper deals with construction of the high - speed measuring system for the %22insitu%22 Langmuir Probe diagnostics of the plasma. The system is dedicated for special applications in the plasma - chemical deposition processes.
The paper deals with construction of the high - speed measuring system for the %22insitu%22 Langmuir Probe diagnostics of the plasma. The system is dedicated for special applications in the plasma - chemical deposition processes. (en)