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rdf:type
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Description
| - Dual-mode microwave/radiofrequency (MW/RF) plasmas were systematically investigated by means of Langmuir probe measurements and by mass spectrometry. Maxwellian-like electron distribution functions were found for both MW and MW/RF argon plasmas, while the distribution functions measured in nitrogen revealed two groups of electrons with different energies. Both in argon and nitrogen, the electron density, ne decreased with rising pressure, almost independent of the bias voltage on the RF electrode. The ne value decays exponentially with distance from the MW applicator with a characteristic length comparable to the skin depth. Comparison of ne values from the probe measurements with values calculated from the ion energy distribution functions and ion fluxes exhibit an excellent agreement.
- Dual-mode microwave/radiofrequency (MW/RF) plasmas were systematically investigated by means of Langmuir probe measurements and by mass spectrometry. Maxwellian-like electron distribution functions were found for both MW and MW/RF argon plasmas, while the distribution functions measured in nitrogen revealed two groups of electrons with different energies. Both in argon and nitrogen, the electron density, ne decreased with rising pressure, almost independent of the bias voltage on the RF electrode. The ne value decays exponentially with distance from the MW applicator with a characteristic length comparable to the skin depth. Comparison of ne values from the probe measurements with values calculated from the ion energy distribution functions and ion fluxes exhibit an excellent agreement. (en)
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Title
| - Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen
- Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen (en)
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skos:prefLabel
| - Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen
- Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen (en)
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skos:notation
| - RIV/60076658:12410/01:00003007!RIV/2002/MSM/124102/N
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/60076658:12410/01:00003007
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - electron distribution functions, Langmuir probe measurements (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - 15th International symposium on Plasma Chemistry
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...ocetUcastnikuAkce
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http://linked.open...nichUcastnikuAkce
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Hong, J.
- Špatenka, Petr
- Pavel, J.
- Šerý, Michal
- Martinu, L.
- Wertheimer, M. R.
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
| - GREMI, CNRS/University of Orléans
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http://localhost/t...ganizacniJednotka
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