About: Pulsed laser deposition of thin films on actively cooled substrates     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • The paper deals with a special arrangement of pulsed laser deposition (PLD) when the substrates were cooled at cryogenic temperatures by liquid nitrogen during the deposition process. Applied materials - zinc oxide and titanium dioxide - play an important role in current optoelectronics and sensor research and a comparative study of their behaviour in presented PLD arrangements were performed. Prepared films (deposited on different substrates: Si (100) and sapphire) were investigated in as-deposited states and their properties in dependence of deposition temperature were compared. Investigation by X-ray diffraction and Raman spectroscopy proved their amorphous structure. Subsequently, annealing under different temperatures (up to 800°C) was applied and properties of modi?ed structures were compared by using different analytical methods (scanning electron microscopy, X-ray diffraction, Raman spectroscopy, optical absorption spectroscopy and spectroscopic ellipsometry).
  • The paper deals with a special arrangement of pulsed laser deposition (PLD) when the substrates were cooled at cryogenic temperatures by liquid nitrogen during the deposition process. Applied materials - zinc oxide and titanium dioxide - play an important role in current optoelectronics and sensor research and a comparative study of their behaviour in presented PLD arrangements were performed. Prepared films (deposited on different substrates: Si (100) and sapphire) were investigated in as-deposited states and their properties in dependence of deposition temperature were compared. Investigation by X-ray diffraction and Raman spectroscopy proved their amorphous structure. Subsequently, annealing under different temperatures (up to 800°C) was applied and properties of modi?ed structures were compared by using different analytical methods (scanning electron microscopy, X-ray diffraction, Raman spectroscopy, optical absorption spectroscopy and spectroscopic ellipsometry). (en)
Title
  • Pulsed laser deposition of thin films on actively cooled substrates
  • Pulsed laser deposition of thin films on actively cooled substrates (en)
skos:prefLabel
  • Pulsed laser deposition of thin films on actively cooled substrates
  • Pulsed laser deposition of thin films on actively cooled substrates (en)
skos:notation
  • RIV/49777513:23640/13:43918866!RIV14-MSM-23640___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ED2.1.00/03.0088)
http://linked.open...iv/cisloPeriodika
  • December
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 101028
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23640/13:43918866
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • titanium oxide; zinc oxide; phase transition; amorphous structure; Pulsed laser deposition (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
  • [554BE1929166]
http://linked.open...i/riv/nazevZdroje
  • Vacuum
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 98
http://linked.open...iv/tvurceVysledku
  • Bruncko, Jaroslav
  • Michalka, Miroslav
  • Netrvalová, Marie
  • Vincze, Andrej
  • Šutta, Pavol
  • Uherek, František
issn
  • 0042-207X
number of pages
http://bibframe.org/vocab/doi
  • 10.1016/j.vacuum.2013.01.024
http://localhost/t...ganizacniJednotka
  • 23640
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 67 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software