About: Cryogenic pulsed laser deposition of ZnO

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The paper deals with the pulsed laser deposition technology and in this special case the substrate was cooled at cryogenic temperature by liquid nitrogen during the deposition process. This approach is proper for growth of highly disordered structures with new physical properties and zinc oxide was applied as experimental example for demonstration. Films were deposited on different substrates: Si (100) and sapphire (0001) and subsequently annealed at different temperatures (200-800 °C). Their properties were investigated by various analytical methods. X-ray diffraction (XRD) proved fully amorphous structure of as-grown ZnO layers which were cooled during the deposition process. Annealing of these amorphous layers changed their properties according to temperature level and annealing time. XRD and scanning electron microscopy (SEM) revealed recrystallized structure. The paper deals with the pulsed laser deposition technology and in this special case the substrate was cooled at cryogenic temperature by liquid nitrogen during the deposition process. This approach is proper for growth of highly disordered structures with new physical properties and zinc oxide was applied as experimental example for demonstration. Films were deposited on different substrates: Si (100) and sapphire (0001) and subsequently annealed at different temperatures (200-800 °C). Their properties were investigated by various analytical methods. X-ray diffraction (XRD) proved fully amorphous structure of as-grown ZnO layers which were cooled during the deposition process. Annealing of these amorphous layers changed their properties according to temperature level and annealing time. XRD and scanning electron microscopy (SEM) revealed recrystallized structure. (en)
Title	Cryogenic pulsed laser deposition of ZnO Cryogenic pulsed laser deposition of ZnO (en)
skos:prefLabel	Cryogenic pulsed laser deposition of ZnO Cryogenic pulsed laser deposition of ZnO (en)
skos:notation	RIV/49777513:23640/12:43897330!RIV13-MSM-23640___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031), P(ED2.1.00/03.0088)
http://linked.open...iv/cisloPeriodika	6
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Netrvalová, Marie Šutta, Pavol
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	129110
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/12:43897330
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Zinc oxide; Recrystallization; Amorphous structure; Cryogenic temperature; Pulsed laser deposition (en)
http://linked.open.../riv/klicoveSlovo	Recrystallization Amorphous structure Cryogenic temperature Pulsed laser deposition Zinc oxide
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[EBD2AF913EDD]
http://linked.open...i/riv/nazevZdroje	Vacuum
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection Centre of the New Technologies and Materials
http://linked.open...UplatneniVysledku	2012
http://linked.open...v/svazekPeriodika	86
http://linked.open...iv/tvurceVysledku	Bruncko, Jaroslav Michalka, Miroslav Netrvalová, Marie Vincze, Andrej Šutta, Pavol Uherek, František
issn	0042-207X
number of pages	5 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.vacuum.2011.07.033
http://localhost/t...ganizacniJednotka	23640

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