About: Modification of physical properties of sputtered zinc oxide thin films by introduction of gallium and nitrogen     Goto   Sponge   NotDistinct   Permalink

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  • Our previous investigations showed that nitrogen doping had a great impact on microstructure, electrical and optical properties of sputtered ZnO thin films. Aims of current research are to investigate the influence of nitrogen implantation and post-implantation annealing on physical properties of sputtered ZnO:Ga thin films and once more to attempt p-type doping.
  • Our previous investigations showed that nitrogen doping had a great impact on microstructure, electrical and optical properties of sputtered ZnO thin films. Aims of current research are to investigate the influence of nitrogen implantation and post-implantation annealing on physical properties of sputtered ZnO:Ga thin films and once more to attempt p-type doping. (en)
Title
  • Modification of physical properties of sputtered zinc oxide thin films by introduction of gallium and nitrogen
  • Modification of physical properties of sputtered zinc oxide thin films by introduction of gallium and nitrogen (en)
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  • Modification of physical properties of sputtered zinc oxide thin films by introduction of gallium and nitrogen
  • Modification of physical properties of sputtered zinc oxide thin films by introduction of gallium and nitrogen (en)
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  • RIV/49777513:23640/11:43911858!RIV12-MSM-23640___
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  • P(1M06031), P(ED2.1.00/03.0088)
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  • 213325
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  • RIV/49777513:23640/11:43911858
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  • modification; thin film; ZnO:Ga:N (en)
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  • [4807AAB368C5]
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  • Spa Nový Smokovec, High Tatras, Slovakia
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  • Žilina
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  • Proceedings of the 17th International Conference on Applied Physics of Condensed Matter
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  • Novotný, Ivan
  • Šutta, Pavol
  • Flickyngerová, Soňa
  • Shtereva, Krasimira
  • Tvarožek, Vladimír
  • Milosavljevič, M.
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number of pages
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  • Žilinská univerzita v Žiline
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  • 978-80-554-0386-1
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  • 23640
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