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Description
  • Resistivity and conductivity type, fundamental properties of semiconductors, are critical parameters in both materials research and after fabrication. A 4-point collinear probe and the appropriate test equipment can be used to determine both resistivity and conductivity type. Using 4 probes eliminates errors due to the probe resistance, the spreading resistance under each probe, and the contact resistance between probe and the semiconductor material.
  • Resistivity and conductivity type, fundamental properties of semiconductors, are critical parameters in both materials research and after fabrication. A 4-point collinear probe and the appropriate test equipment can be used to determine both resistivity and conductivity type. Using 4 probes eliminates errors due to the probe resistance, the spreading resistance under each probe, and the contact resistance between probe and the semiconductor material. (en)
Title
  • Resistivity measurement and conductivity type determination for semiconducting materials using a four-point probe
  • Resistivity measurement and conductivity type determination for semiconducting materials using a four-point probe (en)
skos:prefLabel
  • Resistivity measurement and conductivity type determination for semiconducting materials using a four-point probe
  • Resistivity measurement and conductivity type determination for semiconducting materials using a four-point probe (en)
skos:notation
  • RIV/49777513:23640/11:43897228!RIV12-MSM-23640___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(1M06031), P(ED2.1.00/03.0088)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 226740
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  • RIV/49777513:23640/11:43897228
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  • four-probe measurement; conductivity type; resistivity (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [E5174492ACBB]
http://linked.open...v/mistoKonaniAkce
  • Spa Nový Smokovec, High Tatras, Slovakia
http://linked.open...i/riv/mistoVydani
  • Žilina
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  • Proceedings of the 17th International Conference on Applied Physics of Condensed Matter
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http://linked.open...iv/tvurceVysledku
  • Šutta, Pavol
  • Prušáková, Lucie
  • Tvarožek, Vladimír
  • Tesař, Jiří
  • Benko, Peter
  • Vavrinsky, Erik
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
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  • Univerzita v Žilině
https://schema.org/isbn
  • 978-80-554-0386-1
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  • 23640
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