About: Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition     Goto   Sponge   NotDistinct   Permalink

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  • The a-Si:H ?lms with different thickness and microstructure have been deposited with rf-PECVD using a plasma of silane diluted with hydrogen. The structure and optical analysis were carried out by X-ray diffraction, UV/VIS and Raman spectroscopy. Spectral refractive indices, optical energy band gaps, extinction coef?cients, phases ratio and grain size were determined as a function of the hydrogen dilution (R = H2/SiH4). Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to micro-crystalline hydrogenated silicon (mc-Si:H). XRD analysis indicated that ?lms with R = 0 and R = 20 were amorphous and homogeneous, while ?lms with R = 40 and higher were micro-crystalline consisting medium range ordered silicon hydride (Si4H) and mc-Si phases with different size of crystallites, which was con?rmed also by Raman spectroscopy.
  • The a-Si:H ?lms with different thickness and microstructure have been deposited with rf-PECVD using a plasma of silane diluted with hydrogen. The structure and optical analysis were carried out by X-ray diffraction, UV/VIS and Raman spectroscopy. Spectral refractive indices, optical energy band gaps, extinction coef?cients, phases ratio and grain size were determined as a function of the hydrogen dilution (R = H2/SiH4). Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to micro-crystalline hydrogenated silicon (mc-Si:H). XRD analysis indicated that ?lms with R = 0 and R = 20 were amorphous and homogeneous, while ?lms with R = 40 and higher were micro-crystalline consisting medium range ordered silicon hydride (Si4H) and mc-Si phases with different size of crystallites, which was con?rmed also by Raman spectroscopy. (en)
Title
  • Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition
  • Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition (en)
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  • Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition
  • Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition (en)
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  • RIV/49777513:23640/10:43898566!RIV12-MSM-23640___
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  • P(1M06031)
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  • 4
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  • 277145
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  • RIV/49777513:23640/10:43898566
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  • Raman spectroscopy; X-ray diffraction; PE-CVD; Phase transition; a-Si:H ?lm (en)
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  • GB - Spojené království Velké Británie a Severního Irska
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  • [CC0E415F5EBD]
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  • Vacuum
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  • 85
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  • Netrvalová, Marie
  • Šutta, Pavol
  • Prušáková, Lucie
  • Müllerová, Jarmila
  • Vavruňková, Veronika
issn
  • 0042-207X
number of pages
http://bibframe.org/vocab/doi
  • 10.1016/j.vacuum.2010.01.021
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  • 23640
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