About: Structural and optical properties of PECVD a-Si:H influenced by different hydrogen dilutions     Goto   Sponge   NotDistinct   Permalink

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  • Thin films of hydrogenated amorphous silicon were deposited by plasma - enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen (dilution D range 5 – 40). Thickness of the samples was 300 nm. The applied techniques for structural and optical analysis were: XRD diffraction, UV- VIS spectrophotometry and FTIR. Micro-crystallite regions appeared only at higher hydrogen dilutions (D = 33, 40). Structure includes an amorphous phase with the short-range order are called protocrystalline silicon. Structural properties were obtained from the XRD analysis. The results of optical spectrometry measurement of the films are also presented.
  • Thin films of hydrogenated amorphous silicon were deposited by plasma - enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen (dilution D range 5 – 40). Thickness of the samples was 300 nm. The applied techniques for structural and optical analysis were: XRD diffraction, UV- VIS spectrophotometry and FTIR. Micro-crystallite regions appeared only at higher hydrogen dilutions (D = 33, 40). Structure includes an amorphous phase with the short-range order are called protocrystalline silicon. Structural properties were obtained from the XRD analysis. The results of optical spectrometry measurement of the films are also presented. (en)
  • Tenké vrstvy hydrogenizovaného amorfního křemíku byly připraveny PECVD technologií ze silanu zředěného vodíkem (zředění D = 5 - 40). Tloušťka vrstev byla 300 nm. Použité techniky pro vyšetřování strukturních a optických vlastností jsou: rtg difrakce, UV - VIS spektrofotometrie a FTIR. Mikrokrystalické oblasti se objevily pouze při vyšším vodíkovém zředění (D= 33, 40). Struktura obsahující amorfní fázi s uspořádáním na krátkou vzdálenost je nazývána tzv. protokrystalickým křemíkem. Strukturní vlastnosti byly určeny z rtg analýzy. Dále jsou zde prezentovány výsledky z optické spektrometrie. (cs)
Title
  • Structural and optical properties of PECVD a-Si:H influenced by different hydrogen dilutions
  • Strukturní a optické vlastnosti PECVD a-Si:H ovlivněné různým vodíkovým zředěním (cs)
  • Structural and optical properties of PECVD a-Si:H influenced by different hydrogen dilutions (en)
skos:prefLabel
  • Structural and optical properties of PECVD a-Si:H influenced by different hydrogen dilutions
  • Strukturní a optické vlastnosti PECVD a-Si:H ovlivněné různým vodíkovým zředěním (cs)
  • Structural and optical properties of PECVD a-Si:H influenced by different hydrogen dilutions (en)
skos:notation
  • RIV/49777513:23640/07:00000030!RIV08-MSM-23640___
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  • 104-107
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  • P(1M06031)
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  • 452840
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  • RIV/49777513:23640/07:00000030
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  • a-Si:H; dilution; PECVD; structural properties; optical properties (en)
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  • [A72B96C454E9]
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  • Štrbské Pleso
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  • Bratislava
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  • Vákuové technológie - nové trendy vo výskume a aplikáciách
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  • Šutta, Pavol
  • Müllerová, Jarmila
  • Vavruňková, Veronika
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number of pages
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  • Slovenská vákuová spoločnosť
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  • 978-80-969435-3-1
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  • 23640
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