About: RF diode reactive sputtering of n- and p-type zinc oxide thin films

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	V tomto příspěvku je prezentován vztah mezi parametry reaktivního RF diodového naprašování ze ZnO terče a krystalickými, elektrickými a optickými vlastnostmi n-/p-typu tenkých vrstev ZnO. Vlastnosti tenkých vrstev ZnO závisí na RF výkonu, substrátu, teplotě a částečně na pracovním plynu složeného z Ar/O2 a Ar/N2. (cs) We present the relationship between parameters of reactive RF diode sputtering from a zinc oxide (ZnO) target and the crystalline, electrical and optical properties of n-/p-type ZnO thin films depended on RF power, substrate temperature and, particularly, on working gas mixtures of Ar/O2 and of Ar/N2. Sputtering in Ar+O2 working gas (up to 75% of O2)improved the structure of an n-type ZnO thin film, from fibrous ZnO grains to colummar crystallites, both preferentially oriented along the c-axis normally to the substrate (<002> direction). These films had good piezoelektric properties but also high resistivity (ρ≈10E3 Ωcm). ZnO:N p-type films exhibited nanograin structure with preferential <002> orientation at 25% N2 and <002> orientation for higher N2 content. We present the relationship between parameters of reactive RF diode sputtering from a zinc oxide (ZnO) target and the crystalline, electrical and optical properties of n-/p-type ZnO thin films depended on RF power, substrate temperature and, particularly, on working gas mixtures of Ar/O2 and of Ar/N2. Sputtering in Ar+O2 working gas (up to 75% of O2)improved the structure of an n-type ZnO thin film, from fibrous ZnO grains to colummar crystallites, both preferentially oriented along the c-axis normally to the substrate (<002> direction). These films had good piezoelektric properties but also high resistivity (ρ≈10E3 Ωcm). ZnO:N p-type films exhibited nanograin structure with preferential <002> orientation at 25% N2 and <002> orientation for higher N2 content. (en)
Title	RF diode reactive sputtering of n- and p-type zinc oxide thin films RF diode reactive sputtering of n- and p-type zinc oxide thin films (en) RF diodové naprašováni tenkých vrstev oxidu zinku n- a p-typu (cs)
skos:prefLabel	RF diode reactive sputtering of n- and p-type zinc oxide thin films RF diode reactive sputtering of n- and p-type zinc oxide thin films (en) RF diodové naprašováni tenkých vrstev oxidu zinku n- a p-typu (cs)
skos:notation	RIV/49777513:23640/07:00000022!RIV08-MSM-23640___
http://linked.open.../vavai/riv/strany	166
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1M06031)
http://linked.open...iv/cisloPeriodika	0
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Šutta, Pavol
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Nové technologie - výzkumné centrum
http://linked.open...dnocenehoVysledku	447783
http://linked.open...ai/riv/idVysledku	RIV/49777513:23640/07:00000022
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	thin film; zinc oxide; RF sputtering (en)
http://linked.open.../riv/klicoveSlovo	thin film zinc oxide RF sputtering
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[6AE03A2551D4]
http://linked.open...i/riv/nazevZdroje	Vacuum
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Materials and components for environment protection
http://linked.open...UplatneniVysledku	2007
http://linked.open...iv/tvurceVysledku	Novotný, Ivan Šutta, Pavol Tvarožek, Vladimír Kováč, J. Vincze, A. Shtereva, K. Srnánek, R.
issn	0042-207X
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	23640

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