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rdf:type
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Description
| - The ternary and quaternary materials containing Si, B, C and N have been attracting great interest due to their new features which can be used in microelectronics and coating technologies. The paper deals with influence of various deposition parameters on mechanical properties of these films.
- The ternary and quaternary materials containing Si, B, C and N have been attracting great interest due to their new features which can be used in microelectronics and coating technologies. The paper deals with influence of various deposition parameters on mechanical properties of these films. (en)
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Title
| - Hard Si-B-C-N films prepared by reactive magnetron sputtering
- Hard Si-B-C-N films prepared by reactive magnetron sputtering (en)
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skos:prefLabel
| - Hard Si-B-C-N films prepared by reactive magnetron sputtering
- Hard Si-B-C-N films prepared by reactive magnetron sputtering (en)
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skos:notation
| - RIV/49777513:23520/13:43918897!RIV14-GA0-23520___
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/49777513:23520/13:43918897
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - magnetron sputtering; mechanical properties; Si-B-C-N films (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Kormunda, Martin
- Vlček, Jaroslav
- Peřina, Vratislav
- Potocký, Štěpán
- Čížek, Jiří
- Soukup, Zbyněk
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http://localhost/t...ganizacniJednotka
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