About: Hard Si-B-C-N films prepared by reactive magnetron sputtering     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • The ternary and quaternary materials containing Si, B, C and N have been attracting great interest due to their new features which can be used in microelectronics and coating technologies. The paper deals with influence of various deposition parameters on mechanical properties of these films.
  • The ternary and quaternary materials containing Si, B, C and N have been attracting great interest due to their new features which can be used in microelectronics and coating technologies. The paper deals with influence of various deposition parameters on mechanical properties of these films. (en)
Title
  • Hard Si-B-C-N films prepared by reactive magnetron sputtering
  • Hard Si-B-C-N films prepared by reactive magnetron sputtering (en)
skos:prefLabel
  • Hard Si-B-C-N films prepared by reactive magnetron sputtering
  • Hard Si-B-C-N films prepared by reactive magnetron sputtering (en)
skos:notation
  • RIV/49777513:23520/13:43918897!RIV14-GA0-23520___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GP106/02/D096)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 77051
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/13:43918897
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • magnetron sputtering; mechanical properties; Si-B-C-N films (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [42BD18E252EC]
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Kormunda, Martin
  • Vlček, Jaroslav
  • Peřina, Vratislav
  • Potocký, Štěpán
  • Čížek, Jiří
  • Soukup, Zbyněk
http://localhost/t...ganizacniJednotka
  • 23520
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software