About: Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking     Goto   Sponge   NotDistinct   Permalink

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  • The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N2+O2 with pulsed inlet of oxygen. Two kinds of nanocomposite films weresputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses. It was found that both nanocomposites are highly elastic films with relatively high hardness H = 15 to 20 GPa, low effective Young's modulus E* satisfying the condition that the ratio H/E* } 0.1,high elastic recovery We } 60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.
  • The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N2+O2 with pulsed inlet of oxygen. Two kinds of nanocomposite films weresputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses. It was found that both nanocomposites are highly elastic films with relatively high hardness H = 15 to 20 GPa, low effective Young's modulus E* satisfying the condition that the ratio H/E* } 0.1,high elastic recovery We } 60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail. (en)
Title
  • Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking
  • Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking (en)
skos:prefLabel
  • Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking
  • Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking (en)
skos:notation
  • RIV/49777513:23520/12:43915258!RIV13-GA0-23520___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GAP108/12/0393)
http://linked.open...iv/cisloPeriodika
  • 19-20
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 175505
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/12:43915258
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Pulsed inlet of oxygen; Reactive sputtering; Mechanical properties; Al-based composites; Oxynitride; Two-phase nanocomposites (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [B34069AE223A]
http://linked.open...i/riv/nazevZdroje
  • Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 206
http://linked.open...iv/tvurceVysledku
  • Musil, Jindřich
  • Meissner, Michal
  • Tölg, Tomáš
  • Čerstvý, Radomír
  • Jílek, Richard
http://linked.open...ain/vavai/riv/wos
  • 000305662400056
issn
  • 0257-8972
number of pages
http://bibframe.org/vocab/doi
  • 10.1016/j.surfcoat.2012.04.028
http://localhost/t...ganizacniJednotka
  • 23520
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