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Description
  • We present a non-stationary model proposed for high power impulse magnetron sputtering discharges, which is based on a global description of the plasma processes. The model takes into account a typical structure of magnetron discharges by dividing the plasma volume into two zones, the magnetically confined high-density zone above the target racetrack and the bulk plasma zone, where the transport of particles onto the substrate and the chamber walls dominates. The comparisons of the calculated data with measured results for distinct experimental conditions in two different high power impulse magnetron sputtering systems show a good agreement, suggesting that all relevant plasma processes were correctly incorporated into the model equations. The model can be used to gain a more detailed insight into the complicated processes in such types of discharges and to predict the influence of various process parameters on the deposition characteristics.
  • We present a non-stationary model proposed for high power impulse magnetron sputtering discharges, which is based on a global description of the plasma processes. The model takes into account a typical structure of magnetron discharges by dividing the plasma volume into two zones, the magnetically confined high-density zone above the target racetrack and the bulk plasma zone, where the transport of particles onto the substrate and the chamber walls dominates. The comparisons of the calculated data with measured results for distinct experimental conditions in two different high power impulse magnetron sputtering systems show a good agreement, suggesting that all relevant plasma processes were correctly incorporated into the model equations. The model can be used to gain a more detailed insight into the complicated processes in such types of discharges and to predict the influence of various process parameters on the deposition characteristics. (en)
Title
  • A non-stationary model for high power impulse magnetron sputtering discharges
  • A non-stationary model for high power impulse magnetron sputtering discharges (en)
skos:prefLabel
  • A non-stationary model for high power impulse magnetron sputtering discharges
  • A non-stationary model for high power impulse magnetron sputtering discharges (en)
skos:notation
  • RIV/49777513:23520/11:43898486!RIV12-MSM-23520___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(OC10045), Z(MSM4977751302)
http://linked.open...iv/cisloPeriodika
  • 110
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 183990
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/11:43898486
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Global plasma model; Non-stationary model; HiPIMS; Pulsed sputtering; High-power magnetron sputtering (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [41AD3EA98550]
http://linked.open...i/riv/nazevZdroje
  • Journal of Applied Physics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 2011
http://linked.open...iv/tvurceVysledku
  • Kozák, Tomáš
  • Pajdarová, Andrea Dag
http://linked.open...n/vavai/riv/zamer
issn
  • 0021-8979
number of pages
http://bibframe.org/vocab/doi
  • 10.1063/1.3656446
http://localhost/t...ganizacniJednotka
  • 23520
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