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  • In this study, thermal transport was investigated for ceramic films with different silicon, boron, carbon, and nitrogen (Si-B-C-N) compositions. In order to investigate the effect of morphology on thermal barrier properties, the microstructure of these materials was varied from amorphous to nanocrystalline. Thermal conductivity trends of several ceramic thin films were characterized with a TDTR technique. Samples containing two different Si-B-C-N chemical compositions were created by reactive magnetron sputtering and then subjected to annealing at temperatures up to 1400 °C. The room temperature thermal conductivity of the samples prepared via a 50% argon/50% nitrogen gas mixture remained constant, while samples prepared via a 75% argon/25% nitrogen gas mixture exhibited an increase in the thermal conductivity. The experiments reveal which Si-B-C-N film composition remains stable in the amorphous state at high temperatures, thereby retaining lower thermal transport properties.
  • In this study, thermal transport was investigated for ceramic films with different silicon, boron, carbon, and nitrogen (Si-B-C-N) compositions. In order to investigate the effect of morphology on thermal barrier properties, the microstructure of these materials was varied from amorphous to nanocrystalline. Thermal conductivity trends of several ceramic thin films were characterized with a TDTR technique. Samples containing two different Si-B-C-N chemical compositions were created by reactive magnetron sputtering and then subjected to annealing at temperatures up to 1400 °C. The room temperature thermal conductivity of the samples prepared via a 50% argon/50% nitrogen gas mixture remained constant, while samples prepared via a 75% argon/25% nitrogen gas mixture exhibited an increase in the thermal conductivity. The experiments reveal which Si-B-C-N film composition remains stable in the amorphous state at high temperatures, thereby retaining lower thermal transport properties. (en)
Title
  • Thermal conductivity of high-temperature Si-B-C-N thin films
  • Thermal conductivity of high-temperature Si-B-C-N thin films (en)
skos:prefLabel
  • Thermal conductivity of high-temperature Si-B-C-N thin films
  • Thermal conductivity of high-temperature Si-B-C-N thin films (en)
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  • RIV/49777513:23520/11:43896514!RIV12-MSM-23520___
http://linked.open...avai/riv/aktivita
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  • P(OC10045), Z(MSM4977751302)
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  • 7
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  • 235152
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  • RIV/49777513:23520/11:43896514
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  • X-ray diffraction; reactive magnetron sputtering; time-domain thermoreflectance; thermal barrier coatings (en)
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  • US - Spojené státy americké
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  • [0C9209398929]
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  • Surface & Coatings Technology
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  • 206
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  • Vlček, Jaroslav
  • Gengler, Jamie J.
  • Hu, Jianjun
  • Jones, John G.
  • Steidl, Petr
  • Voevodin, Andrey A.
http://linked.open...n/vavai/riv/zamer
issn
  • 0257-8972
number of pages
http://bibframe.org/vocab/doi
  • 10.1016/j.surfcoat.2011.07.058
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  • 23520
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