About: High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering     Goto   Sponge   NotDistinct   Permalink

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  • Amorphous Si-B-C-N films with two compositions (Si34B9C4N49 and Si36B13C7N40) and low contamination level (H+O+Ar < 4 at.%) were deposited on silicon substrates by reactive dc magnetron co-sputtering using two different targets and gas mixtures. Thermal stability of these films was investigated in terms of composition, bonding structure, as well as mechanical and optical properties after annealing in helium up to the 1300°C substrate limit. Furthermore, both Si-B-C-N materials studied here exhibited extremely high oxidation resistance in air up to the 1300°C substrate limit.
  • Amorphous Si-B-C-N films with two compositions (Si34B9C4N49 and Si36B13C7N40) and low contamination level (H+O+Ar < 4 at.%) were deposited on silicon substrates by reactive dc magnetron co-sputtering using two different targets and gas mixtures. Thermal stability of these films was investigated in terms of composition, bonding structure, as well as mechanical and optical properties after annealing in helium up to the 1300°C substrate limit. Furthermore, both Si-B-C-N materials studied here exhibited extremely high oxidation resistance in air up to the 1300°C substrate limit. (en)
Title
  • High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering
  • High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering (en)
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  • High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering
  • High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering (en)
skos:notation
  • RIV/49777513:23520/09:00501690!RIV10-MSM-23520___
http://linked.open...avai/riv/aktivita
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  • Z(MSM4977751302)
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  • 1
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  • 317184
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  • RIV/49777513:23520/09:00501690
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  • Si-B-C-N films; magnetron co-sputtering; bonding structure; hardness; optical properties; thermal stability (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [052488572CE1]
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  • Thin Solid Films
http://linked.open...in/vavai/riv/obor
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  • 518
http://linked.open...iv/tvurceVysledku
  • Vlček, Jaroslav
  • Martinů, Ludvík
  • Hřeben, Stanislav
  • Kalaš, Jiří
  • Klemberg-Sapieha, Jolanta
  • Vernhes, Richard
http://linked.open...ain/vavai/riv/wos
  • 000270628800030
http://linked.open...n/vavai/riv/zamer
issn
  • 0040-6090
number of pages
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  • 23520
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