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  • The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction.
  • The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction. (en)
  • Rozložení a tvar výboje duálního magnetronu nezáleží pouze na polaritě magnetů u jednotlivých magnetronů, ale rovněž na rozložení magnetického pole mezi těmito magnetrony. V případě skloněného duálního magnetronu dochází k odklonu plazmového výboje z roviny symetrie z důvodu vytvoření přirozeného gradientu magnetického pole mezi magnetrony. Tento odklon byl pozorován experimentálně. Získané výsledky jsou v dobrém souladu s teoretickými předpoklady. (cs)
Title
  • Plasma Drift in Dual Magnetron Discharge
  • Drift plazmatu v duálním magnetronovém výboji (cs)
  • Plasma Drift in Dual Magnetron Discharge (en)
skos:prefLabel
  • Plasma Drift in Dual Magnetron Discharge
  • Drift plazmatu v duálním magnetronovém výboji (cs)
  • Plasma Drift in Dual Magnetron Discharge (en)
skos:notation
  • RIV/49777513:23520/08:00500510!RIV09-MSM-23520___
http://linked.open...avai/riv/aktivita
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  • RIV/49777513:23520/08:00500510
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  • Dual magnetron (DM); magnetic field; plasma discharge; plasma drift (en)
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  • US - Spojené státy americké
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  • [B639AAF1BC46]
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  • IEEE Transactions on Plasma Science
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  • 36
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  • Musil, Jindřich
  • Baroch, Pavel
http://linked.open...ain/vavai/riv/wos
  • 000258618200276
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  • 0093-3813
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  • 23520
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