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Description
| - Studie se věnuje nové skupině amorfních nanokompozitních povlaků a-Si3N4/MeNx s vysokým (>50 obj.%) obsahem fáze Si3N4 (Me=Zr, Ta, Mo a W). Tyto nanokompozity vykazují vysokou (>1000°C) teplotní stabilitu zabraňující krystalizaci a vysokou (>1000°C) oxidační odolnost v případě, že je kov Me zabudovaný do nanokompozitu vhodně zvolený. Bylo zjištěno, že vrstva Zr-Si-N deponovaná na substrát Si(100) nevykazuje žádný nárůst hmotnosti (Δm=0) během termogravimetrického měření provedeného v tekoucím vzduchu až do teploty 1300°C, tj. až do teplotního limitu substrátu Si, což není teplotní limit nanokompozitu. (cs)
- This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high thermal stability against crystallization and high oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si substrate exhibits no increase of the mass in thermogravimetric measurements performed in flowing air up to 1300°C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.
- This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high thermal stability against crystallization and high oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si substrate exhibits no increase of the mass in thermogravimetric measurements performed in flowing air up to 1300°C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite. (en)
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Title
| - Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance
- Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance (en)
- Tvrdé nanokompozitní povlaky a-Si3N4/MeNx s vysokou teplotní stabilitou a oxidační odolností (cs)
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skos:prefLabel
| - Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance
- Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance (en)
- Tvrdé nanokompozitní povlaky a-Si3N4/MeNx s vysokou teplotní stabilitou a oxidační odolností (cs)
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skos:notation
| - RIV/49777513:23520/07:00000335!RIV08-MSM-23520___
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/49777513:23520/07:00000335
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - a-Si3N4/MeNx composites; structure; surface morphology; mechanical properties; oxidation resistance; DC reactive magnetron sputtering (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - CH - Švýcarská konfederace
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Musil, Jindřich
- Zeman, Petr
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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