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Description
  • Tento článek pojednává o vlivu přidání vodíku do Ar+O2 výbojové směsi na proces dc reaktivního magnetronového naprašování a na strukturu naprašovaných TiO2 vrstev. Vodík má zásadní vliv při reaktivním naprašování elektricky nevodivých oxidů z kovových terčů, protože plně eliminuje mikroobloukům na rozprašovaném terči. Vodík také silně ovlivňuje závislost parciálního tlaku kyslíku pO2 vs. průtok kyslíku ΦO2. Jsou vysvětleny změny v závislosti pO2=f(ΦO2), které jsou způsobeny přidáním H2 do výbojové Ar+O2 směsi. Speciální pozornost je věnována korelacím mezi depozičními parametry, strukturou, fázovým složením, optickými vlastnostmi a hyd (cs)
  • This article reports on the effect of hydrogen addition into the Ar+O2 discharge mixture on the dc reactive magnetron sputtering prcess and on the structure of sputtered TiO2 films. The hydrogen plays a key role in reactive sputtering of electrically insulating oxides from metallic targets because it fully eliminates arcing on the sputtered target. The hydrogen also strongly influences the dependence of the partial pressure of oxygen po2 vs. flow rate of oxygen. Special attention is devoted to correlations between deposition parameters, structure, phase composition, optical properties and hydrophilic activity of TiO films. It is shown that the presence of H2 in the Ar+O2 mixture does not pravent from the formation of superhydrophilic TiO films.
  • This article reports on the effect of hydrogen addition into the Ar+O2 discharge mixture on the dc reactive magnetron sputtering prcess and on the structure of sputtered TiO2 films. The hydrogen plays a key role in reactive sputtering of electrically insulating oxides from metallic targets because it fully eliminates arcing on the sputtered target. The hydrogen also strongly influences the dependence of the partial pressure of oxygen po2 vs. flow rate of oxygen. Special attention is devoted to correlations between deposition parameters, structure, phase composition, optical properties and hydrophilic activity of TiO films. It is shown that the presence of H2 in the Ar+O2 mixture does not pravent from the formation of superhydrophilic TiO films. (en)
Title
  • Effect of hydrogen on sputtering discharge and properties of TiO2 films
  • Vliv vodíku na výbojovou směs a vlastnosti TiO2 vrstev (cs)
  • Effect of hydrogen on sputtering discharge and properties of TiO2 films (en)
skos:prefLabel
  • Effect of hydrogen on sputtering discharge and properties of TiO2 films
  • Vliv vodíku na výbojovou směs a vlastnosti TiO2 vrstev (cs)
  • Effect of hydrogen on sputtering discharge and properties of TiO2 films (en)
skos:notation
  • RIV/49777513:23520/07:00000150!RIV08-MSM-23520___
http://linked.open.../vavai/riv/strany
  • 675-678
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM4977751302)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 418957
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/07:00000150
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • dc reactive magnetron sputtering; TiO2 films; hydrofilicity; optical properties (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [8C24EA6D30CC]
http://linked.open...v/mistoKonaniAkce
  • Praha
http://linked.open...i/riv/mistoVydani
  • Prague
http://linked.open...i/riv/nazevZdroje
  • XXVIII International conference on phenomena in ionized gases
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Musil, Jindřich
  • Ondok, Václav
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
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  • Ústav fyziky plazmatu AV ČR
https://schema.org/isbn
  • 978-80-87026-01-4
http://localhost/t...ganizacniJednotka
  • 23520
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