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rdf:type
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Description
| - Článek se zabývá oxidací Cu, Zr, ZrCu, ZrO2 a Zr-Cu-O vrstev během podepozičního žíhání v proudícím vzduchu. Vrstvy byly nadeponovány s použitím nevyváženého dc magnetronu z čistých nebo skládaných terčů v Ar nebo ve směsi Ar+O2. Oxidační chování vrstev bylo charakterizováno pomocí vysokoteplotní termogravimetrie a XRD. Mechanické vlastnosti byly měřeny na mikrotvrdoměru Fischerscope H100. Tepelné žíhání bylo provedeno v širokém rozsahu od 300 do 1300 °C. Zvláštní pozornost byla věnována oxidaci Cu a efektu obsahu Cu v Zr-Cu-O vrstvách na jejich oxidační odolnost. Bylo ukázáno, že přeměna Cu <-> Cu2O při ~1040 °C je vratný proces. (cs)
- The article deals with oxidation of Cu,Zr,ZrCu,ZrO2, and Zr-Cu-O films during post-deposition thermal annealing in flowing air. The films were deposited using dc unbalanced magnetron from pure or composed target in Ar or an Ar+O2 mixture. The oxidation behavior of the films was characterized by high-temperature thermogravimetry and XRD. Mechanical properties were measured by a microindenter Fischerscope H100. Thermal annealing was carried out over a wide range from 300 to 1300°C. Special attention was devoted to the oxidation of Cu and to the effect of Cu content in Zr-Cu-O films on the oxidation resistance. It was shown that the conversation CuO-Cu2 at 1040°C is a reversible process.
- The article deals with oxidation of Cu,Zr,ZrCu,ZrO2, and Zr-Cu-O films during post-deposition thermal annealing in flowing air. The films were deposited using dc unbalanced magnetron from pure or composed target in Ar or an Ar+O2 mixture. The oxidation behavior of the films was characterized by high-temperature thermogravimetry and XRD. Mechanical properties were measured by a microindenter Fischerscope H100. Thermal annealing was carried out over a wide range from 300 to 1300°C. Special attention was devoted to the oxidation of Cu and to the effect of Cu content in Zr-Cu-O films on the oxidation resistance. It was shown that the conversation CuO-Cu2 at 1040°C is a reversible process. (en)
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Title
| - Oxidation of Sputtered Cu, Zr, ZrCu, ZrO2, and Zr-Cu-O Films during Thermal Annealing in Flowing Air
- Oxidation of Sputtered Cu, Zr, ZrCu, ZrO2, and Zr-Cu-O Films during Thermal Annealing in Flowing Air (en)
- Oxidace naprašovaných Cu, Zr, ZrCu, ZrO2 a Zr-Cu-O vrstev během tepelného (cs)
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skos:prefLabel
| - Oxidation of Sputtered Cu, Zr, ZrCu, ZrO2, and Zr-Cu-O Films during Thermal Annealing in Flowing Air
- Oxidation of Sputtered Cu, Zr, ZrCu, ZrO2, and Zr-Cu-O Films during Thermal Annealing in Flowing Air (en)
- Oxidace naprašovaných Cu, Zr, ZrCu, ZrO2 a Zr-Cu-O vrstev během tepelného (cs)
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skos:notation
| - RIV/49777513:23520/07:00000105!RIV08-MSM-23520___
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/49777513:23520/07:00000105
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - films; magnetron sputtering; oxidation resistance; thermogravimetry; ZrO2 films; Zr-Cu-O films (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - DE - Spolková republika Německo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Plasma Processes and Polymers
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Musil, Jindřich
- Zeman, Petr
- Čerstvý, Radomír
- Šašek, Martin
- Jirout, Michal
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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