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Description
  • Článek popisuje vliv přidaného hliníku na strukturu, makropnutí, mechanické vlastnosti a oxidační odolnost TiC-Al filmů. Tyto filmy byly naprašovány za použití stejnosměrného nevyváženého magnetronu vybaveného TiC terčem (o čistotě 99.95 %) upevněného Al kroužkem (o čistotě 99.99 %) s proměnným vnitřním průměrem. Bylo zjištěno, že postupné zvýšení obsahu hliníku v TiC-Al vrstvách vede k: (i) postupné změně struktury od krystalického TiC přes XRD amorfní TiC-Al ke krystalickým TiAl2, (ii) snížení tlakového pnutí a jeho přechodu do pnutí tahového (iii) snížení mikrotvrdosti filmů (iv) zlepšení oxidační odolnosti. (cs)
  • The article reports on the effect of Al addition on the structure, macrostress, mechanical properties and oxidation resistance of TiC-Al thin films. These films were sputtered using dc unbalanced magnetron equipped with a TiC target fixed with an Al fixing ring of various inner diameters. It was found that a continuous increase in Al content in the TiC-Al film results in gradual change of the film structure from the crystalline TiC through X-ray amorphous TiC-Al to the crystalline Al2Ti, decrease in the compressive macrostress up to its conversion to the tensile one decrease in film microhardness, and increase in its oxidation resistance.
  • The article reports on the effect of Al addition on the structure, macrostress, mechanical properties and oxidation resistance of TiC-Al thin films. These films were sputtered using dc unbalanced magnetron equipped with a TiC target fixed with an Al fixing ring of various inner diameters. It was found that a continuous increase in Al content in the TiC-Al film results in gradual change of the film structure from the crystalline TiC through X-ray amorphous TiC-Al to the crystalline Al2Ti, decrease in the compressive macrostress up to its conversion to the tensile one decrease in film microhardness, and increase in its oxidation resistance. (en)
Title
  • Effect of Addition on Structure and Properties of Sputtered TiC Films
  • Vliv přidaného hliníku na strukturu a vlastnosti naprašovaných TiC filmů (cs)
  • Effect of Addition on Structure and Properties of Sputtered TiC Films (en)
skos:prefLabel
  • Effect of Addition on Structure and Properties of Sputtered TiC Films
  • Vliv přidaného hliníku na strukturu a vlastnosti naprašovaných TiC filmů (cs)
  • Effect of Addition on Structure and Properties of Sputtered TiC Films (en)
skos:notation
  • RIV/49777513:23520/07:00000103!RIV08-MSM-23520___
http://linked.open.../vavai/riv/strany
  • 0
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  • Z(MSM4977751302)
http://linked.open...iv/cisloPeriodika
  • 0
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...dnocenehoVysledku
  • 418813
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/07:00000103
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Al doping; magnetron sputtering; mechanical properties; oxidation resistance; structure; TiC-Al films (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV
  • [6CAA0B7AEA2F]
http://linked.open...i/riv/nazevZdroje
  • Plasma Processes and Polymers
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Musil, Jindřich
  • Zeman, Petr
  • Soldán, Jan
http://linked.open...n/vavai/riv/zamer
issn
  • 1612-8850
number of pages
http://localhost/t...ganizacniJednotka
  • 23520
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