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Description
  • Bylo zkoumáno vysoko-výkonové pulzní magnetronové deponování TiN filmů. Opakovací frekvence byla 10kHz, využití periody 20% a celkový tlak plynu 1Pa. Časový vývoj výbojové charakteristiky byl měřen v směsi plynů 90%Ar + 10%N2 při hustotě výkonu na terč v pulzu 460W/cm2. Časově-průměrná hmotnostní spektroskopie byla provedena v pozici substrátu. Byla zjištěna dominance (69-85%) argonových iontů v celkovém toku iontů na substrát. S nárůstem hustoty výkonu na terč se rozdělení iontů posouvá k vyšším energiím (do 50eV vzhledem k zemi). Nárůst energií a toků iontů společně s nárůstem poměru N+/N2+ dochází ke změně ve struktuře a mechanických vlastnostech (tvrdost do 27GPa) vzni (cs)
  • High-power pulsed reactive magnetron deposition of TiN films was investigated. The repetition frequency was 10kHz at a fixed 20% duty cycle and total gas pressure of 1 Pa. Time evolutions of the discharge characteristics were measured in a 90% Ar+10%N2 gas mixture at a target power density in a pulse up to 460W/cm2. Time-averaged mass spectroscopy was performed at a substrate position. It was shown that argon ions are strongly dominant in total ion fluxes onto the substrate. With an increase in the target power density, the ion energy distributions were more extended to higher energies. The increasing ion energies and fluxes, together with the increase in the ratio, resulted in changes in structure and mechanical properties of the prepared TiN films.
  • High-power pulsed reactive magnetron deposition of TiN films was investigated. The repetition frequency was 10kHz at a fixed 20% duty cycle and total gas pressure of 1 Pa. Time evolutions of the discharge characteristics were measured in a 90% Ar+10%N2 gas mixture at a target power density in a pulse up to 460W/cm2. Time-averaged mass spectroscopy was performed at a substrate position. It was shown that argon ions are strongly dominant in total ion fluxes onto the substrate. With an increase in the target power density, the ion energy distributions were more extended to higher energies. The increasing ion energies and fluxes, together with the increase in the ratio, resulted in changes in structure and mechanical properties of the prepared TiN films. (en)
Title
  • High-power pulsed magnetron sputtering of TiN films and their mechanical properties
  • Vysoko-výkonové pulzní magnetronové naprašování TiN vrstev a jejich mechanické vlastnosti (cs)
  • High-power pulsed magnetron sputtering of TiN films and their mechanical properties (en)
skos:prefLabel
  • High-power pulsed magnetron sputtering of TiN films and their mechanical properties
  • Vysoko-výkonové pulzní magnetronové naprašování TiN vrstev a jejich mechanické vlastnosti (cs)
  • High-power pulsed magnetron sputtering of TiN films and their mechanical properties (en)
skos:notation
  • RIV/49777513:23520/07:00000065!RIV08-MSM-23520___
http://linked.open.../vavai/riv/strany
  • 794-796
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ME 673), Z(MSM4977751302)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 424154
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/07:00000065
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • high-power pulsed magnetron sputtering; mass spectroscopy; TiN (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [3238B9A509EF]
http://linked.open...v/mistoKonaniAkce
  • Praha
http://linked.open...i/riv/mistoVydani
  • Prague
http://linked.open...i/riv/nazevZdroje
  • XXVIII International conference on phenomena in ionized gases
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Vlček, Jaroslav
  • Lukáš, Jan
  • Burcalová, Kristýna
  • Zuštin, Branislav
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Ústav fyziky plazmatu AV ČR
https://schema.org/isbn
  • 978-80-87026-01-4
http://localhost/t...ganizacniJednotka
  • 23520
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