About: Ion flux characteristics in high-power pulsed magnetron sputtering discharges

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	45eV vzhledem k potenciálu zem (cs) High-power pulsed dc magnetron discharges for ionized high-rate sputtering of copper films were investigated. The repetition frequency was 1kHz at a fixed 20% duty cycle and argon pressures of 0.5Pa and 5Pa. Time evolutions of the discharge characteristics were measured at a target power density in a pulse up to 950W/cm2. Time-averaged mass spectroscopy was performed at substrate positions. It was shown that copper ions are strongly dominant in total ion fluxes onto the substrate. Their energy distributions with a broadened low-energy part at a lower pressure are extended to higher energies (up to 45eV relative to ground potential for the target-to-substrate distance of 100mm). High-power pulsed dc magnetron discharges for ionized high-rate sputtering of copper films were investigated. The repetition frequency was 1kHz at a fixed 20% duty cycle and argon pressures of 0.5Pa and 5Pa. Time evolutions of the discharge characteristics were measured at a target power density in a pulse up to 950W/cm2. Time-averaged mass spectroscopy was performed at substrate positions. It was shown that copper ions are strongly dominant in total ion fluxes onto the substrate. Their energy distributions with a broadened low-energy part at a lower pressure are extended to higher energies (up to 45eV relative to ground potential for the target-to-substrate distance of 100mm). (en)
Title	Ion flux characteristics in high-power pulsed magnetron sputtering discharges Charakterizace iontových toků ve vysokovýkonových pulzních magnetronových výbojích (cs) Ion flux characteristics in high-power pulsed magnetron sputtering discharges (en)
skos:prefLabel	Ion flux characteristics in high-power pulsed magnetron sputtering discharges Charakterizace iontových toků ve vysokovýkonových pulzních magnetronových výbojích (cs) Ion flux characteristics in high-power pulsed magnetron sputtering discharges (en)
skos:notation	RIV/49777513:23520/07:00000061!RIV08-MSM-23520___
http://linked.open.../vavai/riv/strany	0
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM4977751302)
http://linked.open...iv/cisloPeriodika	0
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Burcalová, Kristýna Vlček, Jaroslav Musil, Jindřich Kudláček, Pavel
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Fakulta aplikovaných věd
http://linked.open...dnocenehoVysledku	427540
http://linked.open...ai/riv/idVysledku	RIV/49777513:23520/07:00000061
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	high-power pulsed magnetron sputtering; high-rate sputtering; highly ionized flux onto the substrate; mass spectroscopy (en)
http://linked.open.../riv/klicoveSlovo	high-rate sputtering highly ionized flux onto the substrate mass spectroscopy high-power pulsed magnetron sputtering
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[50188E88C3B6]
http://linked.open...i/riv/nazevZdroje	Europhysics Letters
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...UplatneniVysledku	2007
http://linked.open...iv/tvurceVysledku	Musil, Jindřich Vlček, Jaroslav Kudláček, Pavel Burcalová, Kristýna
http://linked.open...n/vavai/riv/zamer	Procesy ve výbojovém plazmatu a nové tenkovrstvé materiály s unikátními vlastnostmi
issn	0295-5075
number of pages	1 (xsd:int)
http://localhost/t...ganizacniJednotka	23520

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