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Description
| - The high-temperature oxidation resistance of amorphous Zr-Si-N and W-Si-N films with a high Si content deposited by reactive dc magnetron sputtering at different partial pressures of nitrogen was systematically investigated by means of a symmetrical high-resolution thermogravimetry in a flowing air up to an annealing temperature of 1300°C. Additional analyses including X-ray diffraction, light optical microscopy, scanning electron microscopy, atomic force microscopy, and microhardness measurement were carried out as well. The obtained results showed an excellent high-temperature oxidation resistance of the Zr-Si-N films up to 1300°C, a considerably lower oxidation resistance of the W-Si-N films. The W-Si-N films are completely oxidized at 800°C with a subsequent volatilization of unstable WOx oxides.
- The high-temperature oxidation resistance of amorphous Zr-Si-N and W-Si-N films with a high Si content deposited by reactive dc magnetron sputtering at different partial pressures of nitrogen was systematically investigated by means of a symmetrical high-resolution thermogravimetry in a flowing air up to an annealing temperature of 1300°C. Additional analyses including X-ray diffraction, light optical microscopy, scanning electron microscopy, atomic force microscopy, and microhardness measurement were carried out as well. The obtained results showed an excellent high-temperature oxidation resistance of the Zr-Si-N films up to 1300°C, a considerably lower oxidation resistance of the W-Si-N films. The W-Si-N films are completely oxidized at 800°C with a subsequent volatilization of unstable WOx oxides. (en)
- Vysokoteplotní oxidační odolnost amorfních vrstev Zr-Si-N a W-Si-N s vysokým obsahem Si (%2220 at.%) deponovaných reaktivním magnetronovým naprašováním za různého parciálního tlaku dusíku byla systematicky zkoumána pomocí termogravimetrie s vysokým rozlišením v proudícím vzduchu až do teploty 1300°C (limit křemíkového substrátu). Připravené vrstvy byly dále charakterizovány pomocí rentgenové difrakce, optické a skenovací elektronové mikroskopie, mikroskopie atomových sil a měřením mikrotvrdosti. Získané výsledky ukázaly, že vrstvy Zr-Si-N vykazují excelentní oxidační odolnost až do teploty 1300°C na rozdíl od vrstev W-Si-N, které jsou kompletně zoxidované při teplotě 800°C, kdy následně doch (cs)
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Title
| - Difference in high-temperature oxidation resistance of amorphous Zr-Si-N and W-Si-N films with a high Si content
- Srovnání vysokoteplotní oxidační odolnosti amorfních vrstev Zr-Si-N a W-Si-N s vysokým obsahem Si (cs)
- Difference in high-temperature oxidation resistance of amorphous Zr-Si-N and W-Si-N films with a high Si content (en)
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skos:prefLabel
| - Difference in high-temperature oxidation resistance of amorphous Zr-Si-N and W-Si-N films with a high Si content
- Srovnání vysokoteplotní oxidační odolnosti amorfních vrstev Zr-Si-N a W-Si-N s vysokým obsahem Si (cs)
- Difference in high-temperature oxidation resistance of amorphous Zr-Si-N and W-Si-N films with a high Si content (en)
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skos:notation
| - RIV/49777513:23520/06:00000072!RIV07-GA0-23520___
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(GP106/03/D009), Z(MSM4977751302)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/49777513:23520/06:00000072
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - Zr-Si-N; W-Si-N; oxidation resistance; thermogravimetry; sputtering (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Musil, Jindřich
- Zeman, Petr
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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