About: Effect of ion bombardment on properties of hard reactively sputtered Ti(Fe)Nx films     Goto   Sponge   NotDistinct   Permalink

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Description
  • This article reports on results of systematic investigation of properties of hard Ti(Fe)Nx films reactively sputtered using a d.c. unbalanced magnetron. The Ti(Fe)Nx films with a low Fe content were selected as typical single-phase material to investigat
  • This article reports on results of systematic investigation of properties of hard Ti(Fe)Nx films reactively sputtered using a d.c. unbalanced magnetron. The Ti(Fe)Nx films with a low Fe content were selected as typical single-phase material to investigat (en)
  • Byl zkoumán vliv energie, dodávané do Ti(Fe)Nx vrstev během jejich růstu dopadajícími ionty na jejich fyzikální a mechanické vlastnosti. (cs)
Title
  • Vliv energie iontů na vlastnosti tvrdých, reaktivně naprašovaných Ti(Fe)Nx vrstev (cs)
  • Effect of ion bombardment on properties of hard reactively sputtered Ti(Fe)Nx films
  • Effect of ion bombardment on properties of hard reactively sputtered Ti(Fe)Nx films (en)
skos:prefLabel
  • Vliv energie iontů na vlastnosti tvrdých, reaktivně naprašovaných Ti(Fe)Nx vrstev (cs)
  • Effect of ion bombardment on properties of hard reactively sputtered Ti(Fe)Nx films
  • Effect of ion bombardment on properties of hard reactively sputtered Ti(Fe)Nx films (en)
skos:notation
  • RIV/49777513:23520/04:00000267!RIV/2005/MSM/235205/N
http://linked.open.../vavai/riv/strany
  • 289-298
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ME 529), Z(MSM 235200002)
http://linked.open...iv/cisloPeriodika
  • 0
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 561934
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/04:00000267
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Ti(Fe)Nx; single-phase films; reactive magnetron sputtering; ion bombardment; physical and mechanical properties; enhanced hardness (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [7AB0AE5DD2B5]
http://linked.open...i/riv/nazevZdroje
  • Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 177-178
http://linked.open...iv/tvurceVysledku
  • Musil, Jindřich
  • Vlček, Jaroslav
  • Poláková, Helena
  • Šůna, Jan
http://linked.open...n/vavai/riv/zamer
issn
  • 0257-8972
number of pages
http://localhost/t...ganizacniJednotka
  • 23520
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