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rdf:type
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Description
| - Ta-Si-N films are used as diffusion barriers between Cu and Si in VLSI technology because they are amorphous and exhibit a good thermal stability. Due to good mechanical properties and a high oxidation resistance, the Ta-Si-N films are also used as pro tective coatings. Si stabilizes an amorphous structure in the film, improves its mechanical properties, such as hardness and adhesion strength.
- Ta-Si-N films are used as diffusion barriers between Cu and Si in VLSI technology because they are amorphous and exhibit a good thermal stability. Due to good mechanical properties and a high oxidation resistance, the Ta-Si-N films are also used as pro tective coatings. Si stabilizes an amorphous structure in the film, improves its mechanical properties, such as hardness and adhesion strength. (en)
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Title
| - High-temperature behavior of Ta-Si-N thin films with a high content of Si
- High-temperature behavior of Ta-Si-N thin films with a high content of Si (en)
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skos:prefLabel
| - High-temperature behavior of Ta-Si-N thin films with a high content of Si
- High-temperature behavior of Ta-Si-N thin films with a high content of Si (en)
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skos:notation
| - RIV/49777513:23520/03:00000136!RIV/2004/MSM/235204/N
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(ME 529), Z(MSM 235200002)
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/49777513:23520/03:00000136
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - thermal stability;thermogravimety;DSC; oxidation resistance;Ta-Si-N (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...ocetUcastnikuAkce
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http://linked.open...nichUcastnikuAkce
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Musil, Jindřich
- Zeman, Petr
- Zeman, Hynek
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
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https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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