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  • Hard films are successfully used to improve functional properties of cutting tools and their lifetime. Despite this fact, new demands in machining of advance materials, however, require new films with enhanced properties to be developed. This paper repo rts on results of a systematic investigation of properties of thin Ti(Fe)Nx, films reactively sputtered using an unbalanced dc magnetron. Main advantages of magnetron sputtering are relatively low deposition temperatures and possibility to scale up the deposition process. Important is also the deposition rate aD of the film because it decides on its price. Therefore, this paper is devoted to aD of Ti(Fe)Nx films, their structure and mechanical properties.
  • Hard films are successfully used to improve functional properties of cutting tools and their lifetime. Despite this fact, new demands in machining of advance materials, however, require new films with enhanced properties to be developed. This paper repo rts on results of a systematic investigation of properties of thin Ti(Fe)Nx, films reactively sputtered using an unbalanced dc magnetron. Main advantages of magnetron sputtering are relatively low deposition temperatures and possibility to scale up the deposition process. Important is also the deposition rate aD of the film because it decides on its price. Therefore, this paper is devoted to aD of Ti(Fe)Nx films, their structure and mechanical properties. (en)
Title
  • Properties of reactively sputtered hard Ti(Fe)Nx films
  • Properties of reactively sputtered hard Ti(Fe)Nx films (en)
skos:prefLabel
  • Properties of reactively sputtered hard Ti(Fe)Nx films
  • Properties of reactively sputtered hard Ti(Fe)Nx films (en)
skos:notation
  • RIV/49777513:23520/03:00000128!RIV/2004/MSM/235204/N
http://linked.open.../vavai/riv/strany
  • 12-15
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ME 529), Z(MSM 235200002)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 623885
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/03:00000128
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Ti(Fe)Nx films;structure;mechanical properties;magnetron sputtering (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [37ADD90BF54B]
http://linked.open...v/mistoKonaniAkce
  • Brno
http://linked.open...i/riv/mistoVydani
  • Brno
http://linked.open...i/riv/nazevZdroje
  • JUNIORMAT ’03
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Musil, Jindřich
  • Šůna, Jan
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • University of Technology
https://schema.org/isbn
  • 80-214-2462-1
http://localhost/t...ganizacniJednotka
  • 23520
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